High Vacuum Metallizing Coating Machinery PVD Magnetron Sputter Coater for Sale

Product Description

High Vacuum metallizing coating machinery pvd magnetron sputter coater for sale
 

Product Description

MAGNETRON SPUTTERING: OVERVIEW

Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.

Magnetron sputtering using DC power is an effective and economical choice for depositing conductive materials such as metals or transparent conductive oxides (TCOs). For magnetic materials such as Fe (iron), Ni (nickel), or Co (cobalt), DC magnetrons can be configured with magnets specifically selected for generating plasma within a strong magnetic field.

Using power delivered at radio frequencies (RF) - typically at 13.56 MHz - and an automatic impedance matching network, the total impedance of the circuit can be regulated to 50 Ω which is suitable for plasma ignition in typical sputtering environments. suitable for materials such as oxides, nitrides, and ceramics

Product Parameters

Technical data of magnetron sputtering coater:

Sample Stage	Size	Dia.150mm
	Heating temperature	Max 500ºC
	Temperature accuracy	±1ºC
	Rotational speed	1-20rpm adjustable
Magnetron Sputtering Source	Quantity	2"×3 ( Other 1",3" 4" size is optional)
	Cooling mode	Water cooling
	Water chiller	Circulating water chiller with flow rate of 10L/min
Vacuum chamber	Chamber size	Dia.325mm×500mm
	Chamber material	Stainless steel
	Watch window	Dia.100mm
	Opening mode	Top cover open
	Cooling	Water cooling
Mass flow meter	Ar, 100SCCM (can be customized according to customer need)
Vacuum system	Model	TN-GZK103-A
	Molecular pump	CY-600
	Backing pump	Rotary vane pump
	Ultimate vacuum	1.0E-5Pa
	Pumping interface	CF160
	Exhaust interface	KF40
	Vacuum measurement	Compound vacuum gauge
	Power supply	AC;220V   50/60Hz
	Pumping rate	Molecular pump: 600L/S rotary vane pump: 1.1L/S   acuum to 1.0E-3Pa in 20 minutes
Power configuration	Quantity	DC*2,  RF*1
	Max output power	DC 500W, RF 300W
Other parameters	Supply voltage	AC220V,50Hz
	Total power	4KW
	Overall size	600mm×650mm×1280mm
	Total Weight	About 500kg

 

Detailed Photos

1. We have magnetron sputtering coater with 1 target, 2 targets, 3 targets, 4 targets, etc. The target can be designed at the top or bottom of the chamber.

2. 0-1000W DC or RF target is available. Bias function is optional

3. Target size: 1-inch, 2-inch, 3-inch, 4-inch, etc.

4. Strong magnetic target and Pernanent magenetic target is optional

5. Magnetron sputtering coater with evaporation, E-beam is available

6. Customized magnetron sputtering coater according to your research process is available!

Packaging & Shipping

We can ship the magnetron sputtering coater by sea, by air, by express, also can arrange shipment according to your requirements.

Company Profile

Zhengzhou CY Scientific Instrument Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our company's main products are: spin coater, thermal evaporation coater , magnetron sputter coater, plasma sputter coater,  E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland,  Canada, etc. and have established long-term cooperative relationships with local dealers
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!

FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.