Compact High Vacuum Sputter Vacuum Chamber for Sputtering Coater

• Vacuum Chamber: Stainless Steel
• Temperature Range: -15 to 150 °c
• Hinged Type Door: Dia.300mm
• Warranty: One Year
• Name: Sputter Vacuum Chamber
• Transport Package: Wooden Box
• Model NO.: CY-SS
• Specification: 105L
• Trademark: CY
• Origin: Zhengzhou, China
• HS Code: 8543709990
• Production Capacity: 210 Sets Per Month

Product Description

Hi Vacuum Chamber Upto 10-6 torr For DIY Sputtering Coater
CY provides pre-built cubic high vacuum chamber to allow customer customize a vacuum system, such as sputtering coater, CVD or ALD at easy and faster, and also can be used as high vacuum storage box.
 

Chamber	Vacuum chamber is made of 304 stainless steel with reinforcing rib Inside vacuum chamber size:  470mm L×445mm D×522mm H  (~ 105 Liters ) Round 380 mm dia. hinged type door with 150 mm Dia glass window Vacuum sealed 150mm diameter glass window is installed on the front door for easy observation Silicone O-ring can be used for all vacuum seals. Pressure range: 1 ·10-6 torr  to ambient pressure ( by turbo-pump) Temperature range: -15 to 150 °C
Ports and fitting	One KF40 port built in right side  of chamber to connect to vacuum pump. Three 1/4" NPS fittings with needle valve are installed for gas inlet & outlet One 1/4 NPS port in stall on top of chamber to connect a vacuum gauge. Top plate is removable to made customized port and fitting Customer fitting and port are available upon request
Warranty	Three years limited warranty