• Three Target Upper Magnetron Sputtering Coater Instrument for Semiconductor Films
  • Three Target Upper Magnetron Sputtering Coater Instrument for Semiconductor Films
  • Three Target Upper Magnetron Sputtering Coater Instrument for Semiconductor Films
  • Three Target Upper Magnetron Sputtering Coater Instrument for Semiconductor Films

Three Target Upper Magnetron Sputtering Coater Instrument for Semiconductor Films

After-sales Service: Online Video
Warranty: 1 Year
Type: Coating Production Line
Coating: Vacuum Coating
Substrate: Steel
Certification: CE
Customization:
Diamond Member Since 2016

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Basic Info.

Model NO.
CY-MSP500S-2DC-1RF
Condition
New
Cooling Mode
Water Cooling
Water Chiller
Circulating Water Chiller with Flow Rate of 10L/Mi
Chamber Size
Dia.300mm*300mm
Chamber Material
Stainless Steel
Opening Mode
Top Cover Open
Backing Pump
Rotary Vane Pump
Ultimate Vacuum
1.0e-5PA
Transport Package
Wooden Case
Specification
Customized
Trademark
CYKY
Origin
Zhengzhou, China
HS Code
8416100000
Production Capacity
100pieces/Month

Product Description

Three target upper magnetron sputtering coater instrument for semiconductor films

Three target magnetron sputtering coating instrument is a cost-effective magnetron sputtering coating equipment independently developed by our company, which has the characteristics of standardization, modularization and customization. The equipment can be used to prepare single-layer or multi-layer ferroelectric films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, polytetrafluoroethylene films, etc. DC power supply can be used for the preparation of metal films, RF power supply can be used for the preparation of non-metallic films, and the three targets can meet the needs of multi-layer or multiple coating. Compared with similar equipment, the three-target magnetron sputtering coating instrument is not only widely used, but also has the advantages of small volume and easy operation. It is an ideal equipment for preparing material films in the laboratory.

Specification of the Vacuum pvd coater:

Three target magnetron sputtering coating machine (DC power supply + RF power supply)
Sample table Sputtering mode Sputtering orientation upwards, the sample stage is located above the sputtering target;
Center top setting sample holder, with one shutter
Sample holder φ150mm
Control accuracy ±1ºC
Heating range Room temperature~500ºC
Adjustable speed 1-20rpm adjustable
Target base distance adjustable The distance between the target and the substrate can be adjusted electrically


Magnetron target gun
Target plane Circular plane target
Sputtering vacuum 10Pa~0.2Pa
Target diameter 50~50.8mm
Target thickness 2~5mm
Note: if the target is magnetic material (such as Fe, Co, Ni), the thickness cannot be more than 1.5mm, and strong magnetic sputtering gun is required, will need extra charge.
Insulation voltage >2000V
Quantity 2 inches*3;with shutters for each gun
Cable specification SL-16
Target head temperature <=65ºC

Vacuum chamber
Inner wall treatment Electrolytic polishing
Chamber size φ300mm × 350mm
Chamber material 304 stainless steel
Observation window Quartz window, diameter φ100mm with shutter
Sealing method Viton seal
Open method Top opening, cylinder auxiliary support











Gas control system
Flow control 3-way mass flow meter:
Oxygen: range 0~100SCCM
Argon gas: range 0~200SCCM
Nitrogen: range 0~500SCCM
(Note: In order to achieve a higher oxygen-free environment, the vacuum chamber must be cleaned with high-purity inert gas at least 3 times.)
Gas type Argon, nitrogen, oxygen, and other inert gases
Control valve type Solenoid valve
Control valve static state Normally closed
Measuring linearity ±1.5% F.S
Measurement repeatability ±0.2% F.S
Measuring response time ≤8 seconds(T95)
Working pressure range 0.3MPa
Valve body pressure 3MPa
Working temperature (5~45)ºC
Body material Stainless steel 316L
Valve body leakage rate 1×10-8Pa.m3/s
Pipe joints 1/4Compression fitting
Input and output signal 0~5V
Power supply ±15V(±5%)(+15V  50mA,  -15V 200mA)
Overall dimensions (mm) 130 (width) × 102 (height) × 28 (thickness)
Communication Interface RS485 MODBUS protocol
DC power supply Power supply 500W
Output voltage 0~600V
Maximum output current 1A
Timing length 65000 S
Starting time 1~10 S
Quantity 2 sets
RF power supply Power supply 500W
Power output range 0W-500W, with auto match
Maximum reflected power 100W
RF frequency 13.56MHz+/-0.005% stability
Power stability ≤5W
Harmonic component less than -50dbc
Quantity 1 set

Dual targets magnetron sputtering coater product pictures:
Three Target Upper Magnetron Sputtering Coater Instrument for Semiconductor FilmsThree Target Upper Magnetron Sputtering Coater Instrument for Semiconductor FilmsThree Target Upper Magnetron Sputtering Coater Instrument for Semiconductor FilmsThree Target Upper Magnetron Sputtering Coater Instrument for Semiconductor Films


Three Target Upper Magnetron Sputtering Coater Instrument for Semiconductor FilmsThree Target Upper Magnetron Sputtering Coater Instrument for Semiconductor Films

Three Target Upper Magnetron Sputtering Coater Instrument for Semiconductor Films

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Three Target Upper Magnetron Sputtering Coater Instrument for Semiconductor Films
Three Target Upper Magnetron Sputtering Coater Instrument for Semiconductor Films
Three Target Upper Magnetron Sputtering Coater Instrument for Semiconductor Films

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service

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