| Customization: | Available |
|---|---|
| After-sales Service: | Online Video |
| Warranty: | 1 Year |
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Three target magnetron sputtering coating instrument is a cost-effective magnetron sputtering coating equipment independently developed by our company, which has the characteristics of standardization, modularization and customization. The equipment can be used to prepare single-layer or multi-layer ferroelectric films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, polytetrafluoroethylene films, etc. DC power supply can be used for the preparation of metal films, RF power supply can be used for the preparation of non-metallic films, and the three targets can meet the needs of multi-layer or multiple coating. Compared with similar equipment, the three-target magnetron sputtering coating instrument is not only widely used, but also has the advantages of small volume and easy operation. It is an ideal equipment for preparing material films in the laboratory.
Specification of the Vacuum pvd coater:
| Three target magnetron sputtering coating machine (DC power supply + RF power supply) | ||
| Sample table | Sputtering mode | Sputtering orientation upwards, the sample stage is located above the sputtering target; Center top setting sample holder, with one shutter |
| Sample holder | φ150mm | |
| Control accuracy | ±1ºC | |
| Heating range | Room temperature~500ºC | |
| Adjustable speed | 1-20rpm adjustable | |
| Target base distance adjustable | The distance between the target and the substrate can be adjusted electrically | |
Magnetron target gun |
Target plane | Circular plane target |
| Sputtering vacuum | 10Pa~0.2Pa | |
| Target diameter | 50~50.8mm | |
| Target thickness | 2~5mm Note: if the target is magnetic material (such as Fe, Co, Ni), the thickness cannot be more than 1.5mm, and strong magnetic sputtering gun is required, will need extra charge. |
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| Insulation voltage | >2000V | |
| Quantity | 2 inches*3;with shutters for each gun | |
| Cable specification | SL-16 | |
| Target head temperature | <=65ºC | |
Vacuum chamber |
Inner wall treatment | Electrolytic polishing |
| Chamber size | φ300mm × 350mm | |
| Chamber material | 304 stainless steel | |
| Observation window | Quartz window, diameter φ100mm with shutter | |
| Sealing method | Viton seal | |
| Open method | Top opening, cylinder auxiliary support | |
Gas control system |
Flow control | 3-way mass flow meter: Oxygen: range 0~100SCCM Argon gas: range 0~200SCCM Nitrogen: range 0~500SCCM (Note: In order to achieve a higher oxygen-free environment, the vacuum chamber must be cleaned with high-purity inert gas at least 3 times.) |
| Gas type | Argon, nitrogen, oxygen, and other inert gases | |
| Control valve type | Solenoid valve | |
| Control valve static state | Normally closed | |
| Measuring linearity | ±1.5% F.S | |
| Measurement repeatability | ±0.2% F.S | |
| Measuring response time | ≤8 seconds(T95) | |
| Working pressure range | 0.3MPa | |
| Valve body pressure | 3MPa | |
| Working temperature | (5~45)ºC | |
| Body material | Stainless steel 316L | |
| Valve body leakage rate | 1×10-8Pa.m3/s | |
| Pipe joints | 1/4″Compression fitting | |
| Input and output signal | 0~5V | |
| Power supply | ±15V(±5%)(+15V 50mA, -15V 200mA) | |
| Overall dimensions (mm) | 130 (width) × 102 (height) × 28 (thickness) | |
| Communication Interface | RS485 MODBUS protocol | |
| DC power supply | Power supply | 500W |
| Output voltage | 0~600V | |
| Maximum output current | 1A | |
| Timing length | 65000 S | |
| Starting time | 1~10 S | |
| Quantity | 2 sets | |
| RF power supply | Power supply | 500W |
| Power output range | 0W-500W, with auto match | |
| Maximum reflected power | 100W | |
| RF frequency | 13.56MHz+/-0.005% stability | |
| Power stability | ≤5W | |
| Harmonic component | less than -50dbc | |
| Quantity | 1 set | |
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service
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