| Customization: | Available |
|---|---|
| Warranty: | 1 Year |
| Process Tube: | Fused Glass Tube |
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1700 degree Chemical vapor deposition 3 zone high temperature tube furnace
Application of high temperature tube furnace
1.Material preparation
2.precious metals preparation
3.membrane and coating
4. Semiconductor and small metal annealing
5.Chemical vapor deposition method for thin film coating.
Featrues of high temperature tube furnace
1.Upper and lower sub-structure, easy to pick and place tubes
2.High purity quartz tube, can bear max. temperature 1150C
3.Programmable and PID automatic control
4.Imported energy saving chamber material
5.Double layer structure, can prevent user from burn
6.Double cooling fan
|
Model |
CY-T1700-80IC-3ZV10 |
|
Limiting temperature |
1700ºC |
|
Working temperature |
≤1650ºC |
|
Heating rate |
Suggestion 0~20ºC/min |
|
Temperature zone |
Single |
|
Temperature accuracy |
±1ºC |
|
Chamber size |
Φ80×1300(mm) |
|
Heating element |
Imported alloy heating wire |
|
Thermal couple |
B Type |
|
Temperature control |
PID automatic control via SCR power control |
|
Heating curves |
30 steps programmable |
|
Chamber material |
Imported fiber |
|
Heating zone |
190+250+190mm |
|
Working temperature |
1300°c, 1600°c, 1300°c |
|
Tube material |
alundum tube |
|
Tube length |
1300mm |
|
Sealing type |
stainless steel vacuum flange |
|
Tightness |
4.03*10-3Pa |
|
Current and voltage Monitoring |
Analog galvanometer |
|
Main power |
2.5kw |
|
gas way |
3 gas can be connected |
|
A way range |
100SCCM |
|
B way range |
300SCCM |
|
C way range |
500SCCM |
|
Gas line pressure |
0.1-0.15Mpa |
|
System vacuum |
5-10Pa |
|
Pump connection |
KF16 stainless steel Bellows, KF16 clamps, KF16 flapper valve |
|
Vacuum meter |
INFCON |
|
Working voltage |
220V 50-60Hz |
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