500W DC 300W RF Dual-Target Magnetron Sputtering Coater with Two-Channel Mass Flowmeter

Product Details
Customization: Available
Type: Coating Production Line
Coating: Vacuum Coating
Manufacturer/Factory & Trading Company

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  • 500W DC 300W RF Dual-Target Magnetron Sputtering Coater with Two-Channel Mass Flowmeter
  • 500W DC 300W RF Dual-Target Magnetron Sputtering Coater with Two-Channel Mass Flowmeter
  • 500W DC 300W RF Dual-Target Magnetron Sputtering Coater with Two-Channel Mass Flowmeter
  • 500W DC 300W RF Dual-Target Magnetron Sputtering Coater with Two-Channel Mass Flowmeter
  • 500W DC 300W RF Dual-Target Magnetron Sputtering Coater with Two-Channel Mass Flowmeter
  • 500W DC 300W RF Dual-Target Magnetron Sputtering Coater with Two-Channel Mass Flowmeter
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Basic Info.

Model NO.
CY-MSP300S-RFDC
Substrate
Steel
Certification
CE
Condition
New
Sample Stage
Diameter 185mm
Rotate Speed
1-20rpm Adjustable
Heating Temperature
Max 500ºC
Chamber Material
Stainless Steel
Cooling Mode
Water Cooling
Warranty
One Year
Transport Package
Wooden Box Outside, Plastic Paper Inside
Specification
600mm× 650mm× 1280mm or Customized
Trademark
CYKY
Origin
Zhengzhou, China
Production Capacity
100pieces/Month

Product Description

500W DC 300W RF Dual-target magnetron sputtering coater with two-channel mass flowmeter

Magnetron Sputtering Coater introduction:
Dual-target magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It is standardized, modular and customizable. There are 1-inch or 2-inch magnetron targets for you to choose. Customers can choose the target according to the size of the substrate to be coated. The device is equipped with a 500W DC power supply and a 300W RF power supply. The DC power supply can be used for the preparation of metal film, and the RF power supply can be used for the preparation of non-metal. The two targets can meet the needs of multi-layer or multiple coatings.
The coating machine is equipped with two-channel high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements. The instrument is equipped with advanced turbomolecular pump sets, the ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency. This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.


Magnetron Sputtering Coater application:
This device can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like. Compared with similar equipment, the dual-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory.

Magnetron Sputtering Coater technical parameters:
Sample stage Size φ185mm Temperature control accuracy ±1ºC
Heating temperature Max 500ºC Rotate speed 1-20rpm adjustable
Magnetron Sputtering   target head Quantity 2"×2 (1",2" optional) Water chiller Circulating water chiller   with flow rate of 10L/min
Cooling mode Water cooling    
Vacuum chamber Chamber size φ300mm×300mm Watch window φ100mm
Chamber material Stainless steel Opening mode Top cover open
Mass flowmeter 2 channels; measuring range 100SCCM; 100SCCM (can be customized according to customer needs)
Vacuum system Model CY-GZK103-A Pumping interface KF40
Molecular pump CY-600 Exhaust interface KF16
Backing pump rotary vane pump Vacuum measurement Compound vacuum gauge
Ultimate vacuum 1.0E-5Pa Power supply AC;220V 50/60Hz
Pumping rate Molecular pump:   600L/S  rotary vane pump: 1.1L/S  
Comprehensive gas pumping performance:   vacuum up to 1.0E-3Pa in 20 minutes
Power configuration Quantity DC power supply×1
RF power supply×1
Max output power DC 500W, RF 300 W
Other parameters Supply voltage AC220V,50Hz Overall size 600mm×650mm×1280mm
Total power 2.5KW Total Weight About 300kg

500W DC 300W RF Dual-Target Magnetron Sputtering Coater with Two-Channel Mass Flowmeter
500W DC 300W RF Dual-Target Magnetron Sputtering Coater with Two-Channel Mass Flowmeter
500W DC 300W RF Dual-Target Magnetron Sputtering Coater with Two-Channel Mass Flowmeter

500W DC 300W RF Dual-Target Magnetron Sputtering Coater with Two-Channel Mass Flowmeter500W DC 300W RF Dual-Target Magnetron Sputtering Coater with Two-Channel Mass Flowmeter

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
500W DC 300W RF Dual-Target Magnetron Sputtering Coater with Two-Channel Mass Flowmeter
500W DC 300W RF Dual-Target Magnetron Sputtering Coater with Two-Channel Mass Flowmeter
500W DC 300W RF Dual-Target Magnetron Sputtering Coater with Two-Channel Mass Flowmeter

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service

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