Customization: | Available |
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After-sales Service: | Online Video |
Warranty: | 1 Year |
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RF power supply | Signal frequency | 13.56MHz±0.005% | |
Power output range | 0~300W | ||
Maximum reflected power | 100W | ||
Reflected power (at maximum power) | <3W | ||
Power stability | ±0.1% | ||
Tube furnace | Tube material | High purity quartz | |
Outer diameter of tube | 100mm | ||
Tube length | 1200mm | ||
Furnace chamber length | 440mm | ||
Heating zone length | 200mm+200mm (two temperature zone) | ||
Constant temperature zone length | 200mm | ||
Continuous working temperature | Max.1100ºC | ||
Temperature control accuracy | ±1ºC | ||
Temperature control mode | 30 segment program temperature control | ||
Display mode | LCD | ||
Sealing method | 304 stainless steel vacuum flange | ||
Gas supply system |
Model | CY-6Z | |
Channel numbers | 6 | ||
Measuring unit | Mass flow controller | ||
Measuring range | A channel: 0~200SCCM for H2 | Remarks: If other ranges are required, please specify when ordering. According to the customer's specific requirements, the flow meter of corresponding gas type and range is optional. | |
B channel: 0~200SCCM for CH4 | |||
C channel: 0~200SCCM for C2H4 | |||
C channel: 0~500SCCM for N2 | |||
D channel: 0~500SCCM for NH3 | |||
E channel: 0~500SCCM for Ar | |||
Measurement accuracy | ±1.5%F.S | ||
Working pressure difference | -0.15Mpa~0.15Mpa | ||
Connecting pipe | 304 stainless steel | ||
Gas channel | 304 stainless steel needle valve | ||
Interface specification | 1/4" ferrule connector for gas inlet and outlet | ||
Vacuum system | Mechanical pump | Double-stage rotary vane pump | |
Pumping rate | 1.1L/S | ||
Vacuum measurement | Resistance gauge | ||
Ultimate vacuum | 1.0E-1Pa | ||
Pumping interface | KF16 | ||
Sliding rail | Can achieve the sliding of two temperature zone furnace, to realize rapid temperature rise and fall. | ||
Power supply | AC220V 50Hz |