Three Temperature Zone Pecvd Graphene Preparation

• After-sales Service: Online Video
• Warranty: 1 Year
• Application: School, Hospital, Lab
• Customized: Customized
• Certification: CE
• Structure: Desktop
• Model NO.: CY-PECVD-T01
• Material: Stainless Steel
• Type: Tubular Furnace
• Vacuum Tube Furnace: High Purity Quartz
• Tube Diameter: 50mm
• Heating Zone Length: 400mm
• Operating Temperature: 0-1100c
• RF: 13.56MHz+0.005%
• Gas Supply System: Gas Mass Flowmeter
• Measurement Accuracy: +-0.2%
• Ultimate Vacuum: 1.0e-1PA
• Rotary Vane Pump: 1.1L/S
• Transport Package: Standard Export Fumigation Sign Wooden Box Packagi
• Specification: PECVD furnace
• Trademark: CYKY
• Origin: Zhengzhou Henan China
• Production Capacity: 100 Sets Per Month

Product Description

Three temperature zone PECVD graphene preparation machine with13.56 Mhz RF


Product description of plasma enhanced CVD graphene machine
The plasma enhancement CVD system consists of plasma generator, three-temperature tubular furnace, radio frequency power supply and vacuum system. Plasma enhanced CVD system in order to make the chemical reaction at lower temperature, the use of plasma activity to promote the reaction, so the CVD is called plasma enhanced chemical vapor deposition method (PECVD), the PECVD graphene film preparation equipment with the radio frequency output of 13.56Mhz make film atoms gas ionization, forming plasma, using plasma strong chemical activity, improve the reaction conditions, using the plasma activity to promote the reaction, deposit the desired film on the substrate.
PECVD application area:
Plasma-enhanced CVD system can be used in: graphene preparation, sulfide preparation, nanomaterials preparation and other test sites. SiOx, SiNx, amorphous silicon, microcrystalline silicon, nanosilicon, SiC, diamond-like films can be deposited on the surface of sheet or similar shapes, and p-type and n-type doped films can be deposited. The deposited films have good uniformity, tightness, adhesion, and insulation. It is widely used in cutting tool, high precision mold, hard coating, high duan decoration and other fields

Technical parameters of plasma enhanced CVD graphene machine

Product name	PECVD
Product model	CY-PECVD-T01
Three temperature area pipe furnace	Operating temperature: 0-1100ºC Temperature control accuracy: ± 1ºC Temperature control mode: AI-PID 30 section process curve, which can store multiple pieces Furnace tube material: high-purity quartz Furnace tube size: φ 50mm I.D x 1400mm L Heating temperature area: 200mm + 200mm + 200mm in the three-temperature area Sealing method: stainless steel vacuum flange Maximum vacuum degree: 4.4E-3Pa
RF power supply	Output power: 0-300W maximum adjustable ± 1% RF frequency: 13.56MHz, stability ± 0.005% noise:≤55DB Cooling: air cooling
Mass flowmeter	Three-way mass flowmeter Valve type: stainless steel needle valve Number of air roads: three roads Pressure range: -0.15Mpa~0.15Mpa range 1~200 SCCM 1~200 SCCM 1~500 SCCM Flow control range: ± 1.5% Gas path material: 304 stainless steel Pipe interface: 6.35mm card sleeve connector
Vacuum and sub-atmospheric system	Equipped with a molecular pump system, using one-click operation 600L/S
Water cooling system	CW-3200
Voltage	220V 50HZ

Related photos of plasma enhanced CVD graphene machine

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.





Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service