| Customization: | Available |
|---|---|
| Type: | Coating Production Line |
| Coating: | Vacuum Coating |
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Compact Spin Coater with Vacuum Pump for Max. 4" Wafer
CY-EZ4 is CE certified compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4" diameter.The spinning speed is variable from 100-10000rpm with two programmable segments.
Features
1. 75w brushless dc motor,single chip microcomputer control
2. High-definition display
3. Pre-set single or multi-step coating operate
4. Prevent glue blocking design
5. PP anti- corrosion chamber, replaceable
6. HDPE vacuum adhesive disc
Technical Parameter
|
Model No. |
CY-EZ4 |
|
Chamber dimension |
Φ200mm |
|
Maximum sample |
10mm-100mm |
|
Speed range |
100~9999rpm adjustable |
|
Accelerated speed |
100~9999rpm/s |
|
Speed resolution |
1rpm |
|
Speed accuracy |
< ±5rpm |
|
Control |
5 sets programmable control,each sets with 5 steps |
|
Motor power |
Brushless DC Motor 75w |
|
Working voltage |
AC 110-220V, 50Hz |
|
Outer dimension |
250*210*200mm |
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