| After-sales Service: | Online Video |
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| Warranty: | 1 Year |
| Type: | Coating Production Line |
| Coating: | Vacuum Coating |
| Substrate: | Steel |
| Certification: | CE |
| Customization: |
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Suppliers with verified business licenses
Audited Supplier | Product name | Double target magnetron sputtering coater with transition chamber |
| Product model | CY-MSP325G-2T-DVC-2DC(double vacuum chamber) |
| Installation conditions | 1. Operating environment temperature 25ºC±15ºC, humidity 55%Rh±10%Rh; 2. Equipment power supply: AC220V, 50Hz, must be well grounded; 3. Rated power: 5000w; 4. Equipment gas: the equipment chamber needs to be filled with argon for cleaning, and the customer needs to prepare argon, with a purity of ≥99.99%; 5. The size of the venue is 1200mm×1200mm×2000mm; 6. The placement position requires good ventilation and heat dissipation. |
| Technical parameters | 1. Sputtering power supply: DC power supply 500W x2; maximum output voltage 600V, limit output current 1000mA 2. Magnetron target: 2-inch balanced target with magnetic coupling baffle; 3. Applicable target material for magnetron target: φ50mm x 3mm thick conductive metal target material 4. Cavity size: main cavity φ325mm x 410mm; transition cavity 150x150x150mm 5. Chamber function: The main chamber is equipped with a side door sealed by a sealing ring, a quartz observation window with a baffle, and a manual operating rod for transferring samples. The transition chamber is equipped with an upper cover with a quartz window sealed by a sealing ring, a magnetic coupling push rod for transporting samples into the main chamber, and an independent vacuum system. 6. Cavity material: stainless steel 304 7. Rotating heating sample table: The speed is continuously adjustable from 1 to 20 rpm; the heating temperature is up to 500°C, and the heating rate is recommended to be 10°C/min, and the maximum temperature is 20°C/min. 8. Cooling method: Magnetron target and molecular pump need circulating water cooler; 9. Water cooler: water tank volume 9L, flow rate 10L/min 10. Gas supply system: mass flow meter, gas type AR gas, flow rate 1~200sccm (customizable); 11. Flow meter accuracy: ±1.5% range 12. The pumping interface of the vacuum chamber is CF160; 13. The air inlet interface is a 1/4 inch double ferrule joint; 14. The display is 14 industrial computer all-in-one computers; 15. The sputtering current can be adjusted, and the sputtering safe current value and safe vacuum value can be set; 16. Safety protection: Sputtering current will be automatically cut off when overcurrent and vacuum are too low; 17. Vacuum system: the main chamber is equipped with a CY-GZK103 high vacuum molecular pump set with a pumping speed of 600L/s; the transition chamber is equipped with a small molecular pump set with a pumping speed of 60L/s. The two sets of vacuum systems can work and control independently, and the pneumatic valves between the chambers and in the vacuum system are all controlled by programs, which can realize one-key action, which is convenient and quick. 18. Ultimate vacuum: 5E-4Pa (with molecular pump); 19. The vacuum measurement is a composite vacuum gauge, and its range is: 10-5Pa~105Pa |
| Precautions | 1. In order to achieve a higher oxygen-free environment, the vacuum chamber must be cleaned with high-purity inert gas at least 3 times. 2. Magnetron sputtering is more sensitive to the intake air volume, and a mass flow meter needs to be used to control the intake air volume. 3. Keep the cavity in a vacuum when the equipment is not in use. 4. If it has not been vacuumed for a long time, it should be degassed when it is used again to improve the vacuum performance. |
| Optional accessories | |
| Film thickness monitor | 1. Film thickness resolution: 0.0136Å (aluminum) 2. Film thickness accuracy: ±0.5%, depending on the process conditions, especially the position of the sensor, material stress, temperature and density 3. Measurement speed: 100ms-1s/time, the measurement range can be set: 500000Å (aluminum) 4. Standard sensor crystal: 6MHz 5. Applicable chip frequency: 6MHz Applicable chip size: Φ14mm Mounting flange: CF35 |
| Other accessories | 1. CY-CZK103 series high-performance molecular pump set (including compound vacuum gauge, measuring range 10-5Pa~105Pa); CY-GZK60 series small molecular pump set (including compound vacuum gauge, measuring range 10-5Pa~102Pa) VRD-4 bipolar rotary vane vacuum pump; 2. KF25/40 vacuum bellows; length can be 0.5m, 1m, 1.5m; KF25 clamp bracket 3. Crystal oscillator of film thickness meter; |
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service
Suppliers with verified business licenses
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