High Vacuum CVD Tube Furnace for Polysilicon with Flow-Meter

• Customization: Available
• Application: School, Lab
• Customized: Customized
• Model NO.: CY-O1200-50IIIT-3F-HV
• Certification: CE
• Structure: Desktop
• Material: Stainless Steel
• Type: Tubular Furnace
• Vacuum Tube Furnace: High Purity Quartz
• Tube Diameter: 50mm
• Tube Length: 1300mm
• Heating Zone Length: 300+300+300mm
• Operating Temperature: 0-1100c
• Gas Supply System: Gas Flow Flowmeter
• Measurement Accuracy: +-0.2%
• Ultimate Vacuum: 1.0e-5PA
• Rotary Vane Pump: 1.1L/S
• Molecular Pump: 600L/S
• Transport Package: Standard Export Fumigation Sign Wooden Box Packagi
• Specification: Vacuum quartz tube
• Trademark: CYKY
• Origin: Zhengzhou Henan China

Product Description

high vacuum CVD tube furnace for polysilicon with flow-meter



Product description of vacuum CVD furnace

1200ºC three heating zone high vacuum CVD system with 3-channel float flowmeter CY-O1200-50IIIT-3F-HV onsists of a three-heating zone tube furnace, a three-channel float flow meter and a high vacuum molecular pump set.

tube furnace
The three heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections of temperature rise and fall, with overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.
float flow meter
The system is equipped with a three-channel float flowmeter, which can accurately prepare the mixed gas required for the experiment. Another pressure gauge is installed on the front of the float flowmeter to monitor the gas pressure and the mixing tank pressure.
vacuum system
The system is also equipped with a precision molecular pump set, which can achieve a vacuum degree of 1.0E-3pa, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.

applications: 1200ºC three heating zone high vacuum CVD furnace
It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments( polysilicon  film) that require a variety of gas mixing atmospheres.

Technical parameters of vacuum CVD furnace

Vacuum tube   furnace	Model	CY-O1200-50IIIT
	Tube material	High purity quartz
	Tube diameter	50mm(optional: 60mm, 80mm, 100mm)
	Tube length	1300mm
	Furnace chamber length	1060mm
	Heating zone   length	300mm+300mm+300mm
	Operating   temperature	0~1100ºC
	Temperature   control accuracy	±1ºC
	Temperature   control mode	30 or 50 segment program temperature control
	Display mode	LCD
	Sealing   method	304 stainless steel vacuum flange
	Flange   interface	1/4" ferrule connector, KF16/25/40 joint
	Vacuum	4.4E-3Pa
	Power supply	AC:220V   50/60Hz
Gas supply   system	Model	CY-3F
	Gas channel	3-channel
	Measuring unit	Gas float flowmeter
	Measuring   range	A channel: 0~100ml H2 gas	Remarks: If you need other ranges or gas types, you need to specify when ordering.   According to the customer's specific requirements, the flow meter of the   corresponding gas type and range can be selected.
		B channel: 16~160ml N2 gas
		C channel: 25~250ml Ar gas
	measurement   accuracy	±2.0%
	Pipe pressure resistance	3MPa
	Working   pressure difference	50~300KPa
	Connecting   pipe	304 stainless steel
	Gas channel	304 stainless steel needle valve
	Interface   specification	1/4" ferrule connector for gas inlet and outlet
Exhaust   system	Model	CY-GZK103-A
	Molecular pump	CY-600
	Backing pump	Rotary vane pump
	Pumping rate	Molecular pump: 600L/S		Comprehensive   gas pumping performance: 30 minutes vacuum can reach: 1.0E-3Pa
		Rotary vane pump: 1.1L/S
	Pumping   interface	KF40
	Exhaust   interface	KF16
	Vacuum   measurement	Compound vacuum gauge: Resistance gauge + ionization gauge
	Ultimate   vacuum	1.0E-5Pa
	Power supply	AC:220V   50/60Hz

NOTE: According to the needs of the experiment, you can choose the temperature, temperature zone, furnace size, vacuum system, flowmeter

Related photos of vacuum CVD furnace

tube furnace


float flow meter


high vacuum system

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.





Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service