| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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Plasma-enhanced chemical vapor deposition (PECVD) is a type of chemical vapor deposition characterized by the use of plasma activation at low temperatures to enhance the chemical vapor deposition reaction. The advantages of this method are that the deposition temperature is low, the deposition rate is fast, and the film produced has excellent electrical properties, good substrate adhesion and excellent step coverage.
PECVD vapor deposition application areas:
Plasma enhanced CVD systems can be used in: graphene preparation, sulfide preparation, nanomaterials preparation and other test sites. A variety of films such as SiOx, SiNx, amorphous silicon, microcrystalline silicon, nano -silicon, SiC, diamond-like, etc. can be deposited on the surface of flake or similar shape samples, and P -type and N-type doped films can be deposited. The deposited film has good uniformity, compactness, adhesion and insulation. Widely used in cutting tools, high-precision molds, hard coatings, high-end decoration and other fields, PECVD vapor deposition has a wide range of applications in ultra -large scale integrated circuits, optoelectronic devices, MEMS and other fields.
Technical data of PECVD reactor:
| RF power supply | Signal frequency | 13.56MHz | |
| Power output range | 0~500W | ||
| Maximum reflected power | 100W | ||
| Reflected power | <5W | ||
| Power stability | ±0.1% | ||
| Working Chamber | Heating temperature | RT-1000ºC | |
| Temperature control accuracy | ±1ºC | ||
| Sample holder | Φ200mm | ||
| Rotating speed of sample holder | 1-20rpm adjustable | ||
| Spray head size | Φ90mm | ||
| Distance | The distance between the spray head and the sample is 40-100mm, adjustable | ||
| Working vacuum | 0.133- 133Pa (can be adjusted according to the technical process) | ||
| Flange | The top flange can be lifted by the motor, the substrate is easy to change, and there is a visual window | ||
| Chamber | Stainless steel material, Φ500mm * 500mm | ||
| Observation window | Φ100mm, with baffle | ||
| Gas supply system |
Channel numbers | 6 | |
| Measuring unit | Mass flow controller | ||
| Measuring range | A channel: 0~200SCCM for H2 | Remarks: If other ranges are required, please specify when ordering. According to the customer's specific requirements, the flow meter of corresponding gas type and range is optional. | |
| B channel: 0~200SCCM for CH4 | |||
| C channel: 0~200SCCM for C2H4 | |||
| C channel: 0~500SCCM for N2 | |||
| D channel: 0~500SCCM for NH3 | |||
| E channel: 0~500SCCM for Ar | |||
| Measurement accuracy | ±1.5%F.S | ||
| Working pressure difference | -0.15Mpa~0.15Mpa | ||
| Connecting pipe | 304 stainless steel | ||
| Gas channel | 304 stainless steel needle valve | ||
| Interface specification | 1/4" ferrule connector for gas inlet and outlet | ||
| Vacuum system | Backing pump | 4.7L/s | |
| Molecular pump | 1200L/s | ||
| Vacuum measurement | Compound vacuum gauge, range 10-5Pa ~ 105Pa | ||
| Vacuum degree | 5.0*10-3Pa | ||
| Water chiller | Cooling water temperature | <=37ºC | |
| Water flow | 10L/min | ||
| Power | 0.1KW | ||
| Cooling power | 50W/ºC | ||
| Power supply | AC220V 50Hz | ||
We can ship the PECVD reactor by air by sea, also can arrange shipment according to your requirements.
Zhengzhou CY Scientific Instrument Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
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