1200c Plasma Enhanced Chemical Vapor Deposition Pecvd Vacuum Funace

Product Details
Customization: Available
Application: School, Lab
Customized: Customized
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  • 1200c Plasma Enhanced Chemical Vapor Deposition Pecvd Vacuum Funace
  • 1200c Plasma Enhanced Chemical Vapor Deposition Pecvd Vacuum Funace
  • 1200c Plasma Enhanced Chemical Vapor Deposition Pecvd Vacuum Funace
  • 1200c Plasma Enhanced Chemical Vapor Deposition Pecvd Vacuum Funace
  • 1200c Plasma Enhanced Chemical Vapor Deposition Pecvd Vacuum Funace
  • 1200c Plasma Enhanced Chemical Vapor Deposition Pecvd Vacuum Funace
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Basic Info.

Model NO.
CY-PECVD-T01
Certification
CE
Structure
Desktop
Material
Stainless Steel
Type
Tubular Furnace
Vacuum Tube Furnace
High Purity Quartz
Tube Diameter
50mm
Heating Zone Length
400mm
Operating Temperature
0-1100c
RF
13.56MHz+0.005%
Gas Supply System
Gas Mass Flowmeter
Measurement Accuracy
+-0.2%
Ultimate Vacuum
1.0e-1PA
Rotary Vane Pump
1.1L/S
Transport Package
Standard Export Fumigation Sign Wooden Box Packagi
Specification
PECVD furnace
Trademark
CYKY
Origin
Zhengzhou Henan China

Product Description

1200C Plasma Enhanced Chemical Vapor Deposition PECVD Vacuum Furnace


Product description of PECVD Vacuum Furnace
Plasma enhanced CVD machine consists of a plasma generator, a three-heating zone tube furnace, a single-heating zone tube furnace, an RF power supply, and a vacuum system.
In order for the chemical reaction to take place at a lower temperature, the activity of the plasma is utilized to promote the reaction, and thus the CVD is called plasma enhanced chemical vapor deposition (PECVD). The PECVD graphene film preparation device ionizes a gas containing a film constituent atom by means of a RF output of 13.56 Mhz, forms a plasma in a vacuum chamber, utilizes strong chemical activity of the plasma, improves reaction conditions, and utilizes plasma activity to promote the reaction, then deposits a desired film on the substrate.


applications:
This equipment can be used in various test places such as graphene preparation, sulfide preparation, and nanometer material preparation. Various films such as SiOx, SiNx, amorphous silicon, microcrystalline silicon, nano-silicon, SiC, diamond-like, etc. can be deposited on the surface of a sheet or similar shaped sample, and p-type and n-type doped films can also be deposited. The deposited film has good uniformity, compactness, adhesion, and insulation. It is widely used in the fields of cutters, high-precision molds, hard coatings, high-end decoration, etc.


Technical parameters of  PECVD Vacuum Furnace
 
Three-heating zone tube furnace Model CY-O1200-50IIIT
Tube material High purity quartz
Tube diameter 50mm
Tube length 2830mm
Furnace chamber length 660mm
Heating zone length 200mm+200mm+200mm
Operating temperature 0~1100ºC
Temperature control accuracy ±1ºC
Temperature control mode 30 or 50 segment program temperature control
Display mode LCD
Sealing method 304 stainless steel vacuum flange
Flange interface 1/4" ferrule connector, KF16/25/40 joint
Vacuum 4.4E-3Pa
Power supply AC:220V 50/60Hz
Single-heating zone tube furnace Model CY-O1200-50IT
Tube material High purity quartz
Tube diameter 50mm
Tube length 2830mm
Furnace chamber length 440mm
Heating zone length 400mm
Constant   temperature zone 200mm
Operating   temperature 0~1100ºC
Temperature control accuracy ±1ºC
Temperature control mode 30 or 50 segment program temperature control
Display mode LCD
Sealing method 304 stainless steel vacuum flange
Flange interface 1/4" ferrule connector, KF16/25/40 joint
Vacuum 4.4E-3Pa
Power supply AC:220V 50/60Hz
RF output system Power range 0~500W adjustable
Working frequency 13.56MHz+0.005%
Working mode Continuous output
Display mode LCD
Matched impedance mode Can match, the glow is evenly covered with three heating zone furnace tubes
Power stability ≤2W
Normal working reflected power ≤3W
Amplified reflected power ≤70W
Harmonic component ≤-50dBc
Machine efficiency ≥70%
Power Factor ≥90%
Supply voltage / frequency Single-phase AC (187V~153V) Frequency 50/60Hz
Control mode Internal control / PLC analog / RS232 / 485 communication
Power protection settings DC overcurrent protection, power amplifier over temperature protection, reflected power protection
cooling method Forced air cooling
Glow length In the Ar, the RF power supply and the coil are combined to glow and the glow can fill the length of the furnace in three heating zones.
Gas supply system Four-channel mass flowmeter Mass flowmeter
Flow range MFC1 range: 0~200sccm 
MFC2 range:   0~200sccm
MFC3 range: 0~500sccm 
MFC4 range: 0~500sccm
Corresponding to gases H2, CH4, N2, Ar,
measurement accuracy ±1.5%F.S
Repeatability ±0.2%FS
Linear precision ±1%F.S.
Response time ≤4s
Work pressure -0.15Mpa~0.15Mpa
flow control LCD touch screen control, digital display, each-channel gas contains a needle valve for individual control
Intake interface Can be connected to 1/4NPS or 6mm outer   diameter stainless steel tube
Outlet interface Can be connected to 1/4NPS or 6mm outer   diameter stainless steel tube
Connection method Double ferrule connector
Operating temperature 5~45ºC
Gas premix Equipped with gas premixing device
Exhaust system Mechanical pump Rotary vane pump
Pumping rate 1.1L/S 
Exhaust interface KF16
Vacuum measurement Resistance gauge
Ultimate vacuum 1.0E-1Pa
Power supply AC:220V 50/60Hz
Pumping interface KF16
Rail Rail length 2.5m~3m
It can realize the sliding of one furnace position length in the three-heating zone furnace to achieve rapid temperature rise and fall.

NOTE: According to the needs of the experiment, you can choose the temperature, temperature zone, furnace size, vacuum system, flow meter.


Related photos of PECVD Vacuum Furnace
1200c Plasma Enhanced Chemical Vapor Deposition Pecvd Vacuum Funace


tube furnace
1200c Plasma Enhanced Chemical Vapor Deposition Pecvd Vacuum Funace
1200c Plasma Enhanced Chemical Vapor Deposition Pecvd Vacuum Funace

Exhaust system (vacuum pump)
1200c Plasma Enhanced Chemical Vapor Deposition Pecvd Vacuum Funace
1200c Plasma Enhanced Chemical Vapor Deposition Pecvd Vacuum Funace

1200c Plasma Enhanced Chemical Vapor Deposition Pecvd Vacuum Funace
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.

1200c Plasma Enhanced Chemical Vapor Deposition Pecvd Vacuum Funace

1200c Plasma Enhanced Chemical Vapor Deposition Pecvd Vacuum Funace
1200c Plasma Enhanced Chemical Vapor Deposition Pecvd Vacuum Funace

Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service

 

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