Customization: | Available |
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Application: | School, Lab |
Customized: | Customized |
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Three-heating zone tube furnace | Model | CY-O1200-50IIIT |
Tube material | High purity quartz | |
Tube diameter | 50mm | |
Tube length | 2830mm | |
Furnace chamber length | 660mm | |
Heating zone length | 200mm+200mm+200mm | |
Operating temperature | 0~1100ºC | |
Temperature control accuracy | ±1ºC | |
Temperature control mode | 30 or 50 segment program temperature control | |
Display mode | LCD | |
Sealing method | 304 stainless steel vacuum flange | |
Flange interface | 1/4" ferrule connector, KF16/25/40 joint | |
Vacuum | 4.4E-3Pa | |
Power supply | AC:220V 50/60Hz | |
Single-heating zone tube furnace | Model | CY-O1200-50IT |
Tube material | High purity quartz | |
Tube diameter | 50mm | |
Tube length | 2830mm | |
Furnace chamber length | 440mm | |
Heating zone length | 400mm | |
Constant temperature zone | 200mm | |
Operating temperature | 0~1100ºC | |
Temperature control accuracy | ±1ºC | |
Temperature control mode | 30 or 50 segment program temperature control | |
Display mode | LCD | |
Sealing method | 304 stainless steel vacuum flange | |
Flange interface | 1/4" ferrule connector, KF16/25/40 joint | |
Vacuum | 4.4E-3Pa | |
Power supply | AC:220V 50/60Hz | |
RF output system | Power range | 0~500W adjustable |
Working frequency | 13.56MHz+0.005% | |
Working mode | Continuous output | |
Display mode | LCD | |
Matched impedance mode | Can match, the glow is evenly covered with three heating zone furnace tubes | |
Power stability | ≤2W | |
Normal working reflected power | ≤3W | |
Amplified reflected power | ≤70W | |
Harmonic component | ≤-50dBc | |
Machine efficiency | ≥70% | |
Power Factor | ≥90% | |
Supply voltage / frequency | Single-phase AC (187V~153V) Frequency 50/60Hz | |
Control mode | Internal control / PLC analog / RS232 / 485 communication | |
Power protection settings | DC overcurrent protection, power amplifier over temperature protection, reflected power protection | |
cooling method | Forced air cooling | |
Glow length | In the Ar, the RF power supply and the coil are combined to glow and the glow can fill the length of the furnace in three heating zones. | |
Gas supply system | Four-channel mass flowmeter | Mass flowmeter |
Flow range | MFC1 range: 0~200sccm MFC2 range: 0~200sccm MFC3 range: 0~500sccm MFC4 range: 0~500sccm Corresponding to gases H2, CH4, N2, Ar, |
|
measurement accuracy | ±1.5%F.S | |
Repeatability | ±0.2%FS | |
Linear precision | ±1%F.S. | |
Response time | ≤4s | |
Work pressure | -0.15Mpa~0.15Mpa | |
flow control | LCD touch screen control, digital display, each-channel gas contains a needle valve for individual control | |
Intake interface | Can be connected to 1/4NPS or 6mm outer diameter stainless steel tube | |
Outlet interface | Can be connected to 1/4NPS or 6mm outer diameter stainless steel tube | |
Connection method | Double ferrule connector | |
Operating temperature | 5~45ºC | |
Gas premix | Equipped with gas premixing device | |
Exhaust system | Mechanical pump | Rotary vane pump |
Pumping rate | 1.1L/S | |
Exhaust interface | KF16 | |
Vacuum measurement | Resistance gauge | |
Ultimate vacuum | 1.0E-1Pa | |
Power supply | AC:220V 50/60Hz | |
Pumping interface | KF16 | |
Rail | Rail length | 2.5m~3m It can realize the sliding of one furnace position length in the three-heating zone furnace to achieve rapid temperature rise and fall. |