Plasma Enhanced Pecvd Three-Zone Systsem with Gas Mixer System

• Customization: Available
• Application: School, Lab
• Customized: Customized
• Model NO.: CY-O1200X-SL-MFCVD
• Certification: CE, TUV
• Structure: Desktop
• Material: Steel
• Type: Tubular Furnace
• Thermocouple: K Type
• Matching: Automatic
• Cooling: Air
• Vacuum Sealing: Stainless Steel
• Tube Size: Customized
• Working Temperature: 1100c
• Warranty: One Year
• Transport Package: Wooden Box
• Specification: Dia. 80mm
• Trademark: CY
• Origin: Zhengzhou, China
• HS Code: 85141090
• Production Capacity: 210 Sets Per Month

Product Description

Laboratory Multi-Function Electrical Mini PECVD Tube Furnace

CY-O1200X-SL-MFCVD is a multi-function CVD system, It is composed of 1200 degree tube furnace,RF power and gas mixer system. It is designed for multi-function thin film preparation, CNT growthing, grephene preparation and etc. CY-O1200X-SL-MFCVD is controlled by 30 segment precision temperature controller with +/-1ºC accuracy 
is built into the furnace to allow for heating,dwelling, and cooling at various steps.RS485 port and control software are included to make monitoring the temperature profile via PC while simultaneously running furnace possible. RF power with turb pump can keep the system in high vacuum degree and low temperature for thin film preparation. The gas mixer is equipped to make sure the whole system can insert three or more different gas for different thin film enquiry. The whole system adopt LCD Touch Screen to make sure the system is controlled via sofeware. 

Features
1.Fast heating rate:20°c/min
2.Multi-function: CVD experiment, growth of graphene, crystalline silicon substrate coating and etc
3.LCD touch screen
4.30 steps programmable automatic control
5.Connected with turbo pump can reach 10-5 Torr vacuum degree.
6.Accept PC interface control
7.Three or Four ways gas mixer, can insert variety gas for thin fim preparation

Technical parameters
 

Split Tube Furnace	AC220V, 50/60Hz,  2.5 KW max. power consumption Working temperature:  1100°C continuous and 1200°C Max. 2" quartz tube (50mm O.D x 44mm I.D x 1000mm) with vacuum  sealed flanges.
Temperature  Control	PID automatic control via solid state relay with 30 steps programmable Built in Over Temperature and Thermocouple Failure Protection +/-1°C accuracy K type thermal couple Heating zone  length:  200mm  ( 8") or as customized Continuous temperature zone: 60 mm   (+/-1°C @ 1000 °C ) (80mm,100mm,120mm quartz tube for option)
RF Power	Output Power:5 -300W adjustable with ± 1% stability RF frequency: 13.56 MHz ±0.005% stability   Reflection Power: 200W max. Matching:Automatic RF Output Port:50 Ω, N-type, female Noise:<50 dB.  Cooling: Air cooling.  Power :AC220V, 50/60Hz
Vacuum Sealing	2" quick clamp flange with 1/4'' bard fittings Right flange is connected to a stainless steel  bellows which is stretchable up to 150 mm. Left flange with quick-clamped KF25 vacuum port and 1/4'' barb venting valve  Max. Vacuum level:  10-5 Torr by turbo pump
Internal Traveling  Mechanism	One 1/4" dia. x 24'' long K type thermal couple is inserted Step motor can drive the crucible inside tube from the heating center  to the  right end of the furnace Touch screen control panel allows travel distance setting and  temperature display of crucible position Traveling speed is constant at 800mm/ min.
Gas Mixer	Three gas way can be connected A way speed: 0-100SCCM B way speed: 0-200SCCM C way speed: 0-500SCCM Can insert variety of gas ( oxygen, nitrogen, argon, hydrogen, etc)
Max. Heating &  Cooling Rate	The max heating and cooling rate can be achieved by moving sample  into pre-heated hot zone and move the sample out from hot zone.   The typical ramp/cool rate is listed in below:
Warranty	One year limited warranty with lifetime support (Consumable parts  such as processing tubes and o-rings are not covered by the warranty,)