Customization: | Available |
---|---|
Application: | Wafer |
Cleaning Media: | Dry Cleaning |
Suppliers with verified business licenses
Audited by an independent third-party inspection agency
Power supply: | AC220V |
Working current: | Total working current not higher than1.2A (Not include the vacuum pump) |
RF Power: | 200W |
Radio frequency: | 13.56MHZ(offset less than 0.2Hz) |
Frequency offset | Less than 0.2KHz |
Characteristic impedance: | 50 Ohm,Automatic matching |
Vacuum degree: | 30Pa-100Pa |
Gas flow: | 10-100ml/min(Adjustable) |
Process Control: | MCU Automatic and manual mode |
Cleaning time: | 1-6000 secds adjustable |
Power supply: | 10%-100% Adjustable |
Inside chamber size | 100mm×270mm |
Outside dimension: | 440*390*200mm |
Weight: | 35Kg |
Vacuum chamber temperature | Less than 65°C |
Cooling type: | Forced cooling |