| Customization: | Available |
|---|---|
| Type: | Coating Production Line |
| Coating: | Vacuum Coating |
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10000 RPM Programmable Vacuum Spin Coater for 8 inches Wafer
Economical Vacuum Bench Top Spin Coating Machine is a procedure used to deposit uniform thin films to flat substrates. Usually a small amount of coating material is applied on the center of the substrate, which is either spinning at low speed or not spinning at all. The substrate is then rotated at high speed in order to spread the coating material by centrifugal force. A machine used for spin coating is called a spin coater.
TN-EZ8 spin coater is a high performance compact spin coater. It is designed for high uniformity thin material coatings. The upgraded program can store up to five program/ recipes and each recipe could be edited with five spin steps.
Technical Parameter
| Model | CY-EZ8 |
| Max Spin Speed | 10,000 RPM |
| Speed Resolution | ±1% rpm |
| Max Spin Time | 3000 S |
| Time Resolution | 1 S |
| Chuck diameter | 8 inches (or according to customer's requirement) |
| Max Ramp Rate | 5000 RPM/S |
| Dimensions | 290 mm (W) x 335mm (D) x 215mm (H) |
| Weight | 15 Kg |
| Power | 100-120V, single Phase,200W(110V) 200-230V, single Phase,200W(220V) |
| Required Vacuum | 0.06-0.09Mpa, Minimum 15L/Min flow rate |
| Vacuum Tubing | 4mm ID, 6mm OD |
| Fuse | 2 A(installed) |
| Warranty | 1 year |
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