CYKY Vacuum Lamination press with heating plate and hydraulic pump
CY-VHP-135 IS A CE certified eletric vacuum lamination hot press designed for wafer bonding or thin film transformations up to 100mm x 100mm. It has the max. working temperature of 500ºC along with the max. the pressure of 20 Metric Tons.
Specifications
Structure: Two 135 x 135 mm flat heating platens made of high-temperature resistant Cr steel with max. working temperature of 500 ºC1000W Heating element is inserted into the center of the heating plates for fast heating Max load on 135x135mm heated platen: 10 metric tons at 500ºC( 55kg/ cm2)20 metric tons at RT( 110kg/ cm2)
Two precision temperature controllers which control two heating plates separately with 30 programmable segments Water cooling jackets are built on the both top & bottom of the heating plates for assisting cooling
Hydraulic Pump:
1) Modified electric hydraulic press is connected to a vacuum chamber.
2) Max. travel distance of the bottom ram: 15 mm
3) Automatic max. pressure controlled via a digital pressure gauge.
4) Pressure accuracy: ±0.01 Mpa ( 0.1 kg/cm2)
5) Two flat heating plates are installed with water cooling plates for Max. 500ºC working emperature
6) Max. Opening ofthe pressing platen: 30mm
7) Water cooling( >15L/ min) is required to cool the heating plates when the operating temperature is over 200ºC Temperature control and Pressure display: Two precision temperature controllers with 30 programmable segments control the heating plates separately with +/1°C accuracy. 2) The temperature controllers have PID auto-tune function, over-temperature protection and thermal couple broken protection
Max. Temperature: 500ºC with inert gas or vacuum with accuracy ±1ºC Max Heating rate: 2.5ºC/ min Software and PC interface is built in the controller, which can be connected to a PC for computer controlling via a RS232 connector Digital pressure meter is built outside the vacuum chamber. You can set pressure at the desired value which can stop the electric hydraulic press automatically.
Vacuum Chamber: Electric hydraulic press and heating plates are placed inside the vacuum chamberVacuum chamber is made of SS304 with the size: 525mm* 480mm* 450mmVacuum chamber capacity: about 75Liters300mm dia. Vacuum sealed hinged type door with 150mm dia. Quartz glass window is installed for easy sample loading and ovservationSilicone O-ring can be used for all vacuum sealingsOne precision digital vacuum gauge( 10E-4 torr) is installed on the vacuum chamber
Power Reuirement: Power consuming: 2500WPower input: AC 208~240V, 50/ 60Hz single phase
Water cooling:
One recirculating water chiller for the cooling heating plate from over-heated and faster cooling. Please order separately at extra cost.
Compliance: CE certified
Dimensions: 775mm( L) * 550mm( W) * 1325mm( H)