Oil Free High Speed High Vacuum Dry Pump

• Oil or Not: Oil Free
• Structure: Rotary Vacuum Pump
• Exhauster Method: Positive Displacement Pump
• Vacuum Degree: High Vacuum
• Work Function: Fore Pump
• Working Conditions: Dry
• Model NO.: FF-160
• Outlet Flange: Kf 40 (Dn)
• Inlet Flange: Dn160
• Bearing Type: Ceramic
• Run-up Time(Min.): <6
• Vib(Um): ≤ 0.1
• Cooling Method: Water
• Rotation Speed(Rpm): 36000
• Name: Oil Free High Vacuum Pump
• Transport Package: Wooden Box
• Specification: 600L/S
• Trademark: CY
• Origin: Zhengzhou, China
• HS Code: 8414100090
• Production Capacity: 230 Sets Per Month

Product Description

High speed turbo vacuum pump

1.High speed turbo vacuum pump(600L/S) is directly equipped into a station as picture show for max. vacuum level
2.Heavy duty dual stage mechanical pump, 220 liters/minute (7.8CFM) is connected to turbo pump for faster pumping speed
3.Mobile pump station is included and the compact sputtering coater can be placed on top of station
4.Max. vacuum level: 10^-6 torr with chamber baking
 

Model	FF-160
Pumping Speed(/l/s,Air)	600
Inlet Flange	DN160 ISO-K
Outlet Flange	KF 40 (DN)
Ultimate Vacuum(Pa)	≤ 6x10-4Pa
Rotation Speed(rpm)	36000
Run-Up Time(min.)	< 6
Bearing Type	Ceramic
VIB(um)	≤ 0.1
Backing Pump (l/s)	4-8
Cooling Method,optional	Water
Cooling Water Temperature(ºC)	≤ 25
Bake-out temperature(ºC)	≤ 100
Ambient Temperature (ºC)	S-40
Lubrication	Oil
Mounting or lentation	Vertical ±5°