| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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During ion assisted e-beam evaporation, a beam of ions - typically argon - with a broad range of energies, is directed to the substrate and arrives alongside the material to be deposited. These ions impart energy into the evaporant atoms, leading to greater surface mobility. Increasing the arrival energy and surface mobility can improve the adhesion, density, and grain structure of the deposited film.
For Dielectric Materials
Such as those deposited in optical coating applications, these film improvements also lead to a more reproducible refractive index. When depositing oxides or nitrides, oxygen and nitrogen ions can also be incorporated to the beam to provide a dual 'react-assist' process capability.
Technical Data of e-beam evaporation:
| Operating conditions | Ambient temperature | 5ºC~40ºC |
| Power supply | 380V | |
| Power | ≤20KW | |
| Water pressure | ≤2.5bar | |
| Vacuum chamber size | Evaporation chamber size | φ500×H500(mm) |
| Transition warehouse | φ280×H300(mm) | |
| Electron gun | 1 set of new electron gun, 6-hole crucible | |
| Ion source | 1 set of Kaufman ion source K08 | |
| Sample turntable | Sample size: ≤φ150mm, the sample can be rotated, and the distance between the sample and the electron gun can be adjusted up and down (the shape of the sample holder is designed according to user requirements), the heating temperature is ≤500ºC | |
| System vacuum | Ultimate vacuum | after 12-24 hours of baking, continuous pumping gas≤5x10-5Pa |
| Ultimate vacuum | Pumping rate: Vacuum degree≤5x10-4Pa within 40 minutes from atmospheric pressure | |
| Leakage rate of the system | Leakage rate of the system: the leakage rate of the whole machine is less than or equal to1×10-8Pa.L/s, After stopping the pump for 12 hours, measuring the vacuum degree of the vacuum chamber less than or equal to 10Pa. | |
| Vacuum pumping system | TM160 film thickness meter is used for monitoring. | |
| Coating monitoring | TM160 film thickness meter is used for monitoring | |
| The unevenness of the coating thickness | ≤3% | |
1. We have thermal evaporation coater with 1/2/3/4/8... evaporation sources, can evaporation metal and organic material
2. Chamber material: High purity quartz--- low vacuum, SS304 chamber-- high vacuum
3. Film thickness monitor is optional
4. Thermal evaporation, E-beam, magnetron/plasma sputtering in one machine is available
5. Different material of evaporation source is available
6. Customize thermal evaporation coater according to your reseach process is available
We can ship the e-beam evaporation by sea, by air, also can arrange shipment according to your requirements.
Zhengzhou CY Scientific Instrument Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our main products are: spin coater, thermal evaporation coater , magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, etc. and have established long-term cooperative relationships with local dealers.
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
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