| Customization: | Available |
|---|---|
| Type: | Coating Spray Gun |
| Coating: | Vacuum Coating |
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| Input Voltage | 110/220VAC switchable |
| Output Power | 1600VDC 250W 150mA max. Built-in over current (>150mA) protection |
| Specimen chamber | Quartz glass tube, 167mm OD. x 152mm ID x 260mm Height |
| Sputtering Head & Specimen stage |
2" magnetron sputtering head with water cooling jacket is included One 50 mm Dia stainless steel .sample stage is built in, which is rotatable from 0 - 5 RPM One manually operated shutter is build in to achieve better coating Built in a fixture to place sputtering head when open chamber Distance between sputtering head and sample stage is adjustable from 60 - 100 mm. One Air Cold Recirculating Water Chiller 10L / min Flow is included for cooling sputtering head. |
| Control Panel | 6" color touch-screen control panel for easy operation One panel controls all parameters, including vacuum, current, target position and substrate heating temperature |
| Ultimate Vacuum Pressure |
Built in KF25 vacuum port The system requires a Ar gas tank with pressure regulator, which is not included <10E-2 mbar by vane vacuum pump (not included) 7.5E-5 mbar by Turbo molecular pump (not included) |
| Gas Atmosphere | One needle valve installed to allow Ar gas inlet to achieve better plasma coating |
| Target | Target size: 50 mm dia. x (0.1 - 3) mm,thickness |
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