CVD System, CVD Furnace for Carbon Nanotube, CVD Tube Furnace manufacturer / supplier in China, offering High Vacuum Slidable CVD System for Graphene Growth, 1100c Hydrogen Gas Tube Furnace with 60mm Superalloy Tube with Hydrogen Detector System, U Type Mosi2 Mosi2 Electric Furnace Heating Element and so on.
|Min. Order / Reference FOB Price||1 Set||US $5,600/ Set|
|Production Capacity:||120 Sets/Month|
|Payment Terms:||L/C, T/T, Western Union|
|Processing Tube:||High Quality Quartz|
|Heating Element:||Resistance Wire|
|Furnace Structure||Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.|
One set of sliding rails is installed which allows furnace move from one side to another automatically at variable speeds using the control knob.
Vacuum flanges and digital vacuum gauge are installed for immediate use.
|Voltage||AC 208-240V Single Phase, 50/60 Hz|
|Max. Temperature||1000°C (<1 hour)|
800°C (<2 hours)
Note: RTP furnaces should not be heated for long duration due to thin refractories.
|Temperature Accuracy||+/ - 2°C|
|Max. Heating Rate||50 ºC/s|
|Max. Cooling Rate||Cooling Rate from 900~200C:|
8.3°C/sec (900 - 600°C);
4.4°C/sec (600°C - 500°C);
2.8°C/sec (500°C - 400°C);
1.6°C/sec (400°C - 300°C);
0.9°C/sec (300°C - 200°C);
|Process Tube Size||High purity fused quartz tube|
Ø4" OD x 1400mm L
|Sliding Rails / Table||Dual sliding rails made of Cr plated steel|
Sliding length: 1200 mm
Driven by DC motor
|Sliding Control||Automatic sliding is controlled by temperature controller. When the heating program is finished, the furnace will slide from right to left at the set speed. Air fans will blow heated area to achieve fast cooling.|
Sliding Range: 340mm
Sliding Speed: 0-70 mm/s; adjustable
|Heating Elements||8 pcs Paralleled Infrared Heating ( 1200w each)|
|Thermocouple||K type, 1/4" dia x 24" length|
|Temperature Controller||PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.|
Built in overheating & broken thermocouple broken protection.
Over temperature protection and alarm allows for operation without attendant(s).
+/- 1 ºC temperature accuracy.
|Vacuum Flanges||Stainless steel vacuum flanges are installed on both ends of the tube. |
Hinge-type flange for easy sample loading
Digital vacuum gauge is included
1/4"diameter feedthrough for inserting K type thermal couple
Needle valve with barb gas fitting is built in
KF25 right angle valve is installed for connecting to a vacuum pump
Needle valve for vacuum release is included
|Vacuum Level||Limited by vacuum pump|
10^-2 torr can be achieved by mechanical pump
10^-4 torr can be reached by molecular pump
Vacuum pump is not included, please order separately at related products section
|Flow Meter||One flow-meter is built in with range: 16-160 ml/min|
|Dimensions||460 x 330 x 520 mm ( furnace only)|
1800 x 450 x 680 mm ( furnace + sliding)
|Net Weight||~ 80 Kg|
|Shipping Package Size||74" x 39" x 45"|
|Shipping Weight||300 lbs|
|Warranty||One year limited manufacturer's warranty|