Solar CVD Tube Furnace, Mini System Pecvd, Vacuum Pecvd Tube Furnace manufacturer / supplier in China, offering Mini Solar CVD Tube Furnace with Gas Mixer and Vacuum Gauge, New Design Desktop Large Automatic Vacuum Spin Coater, Dual Function Soft Metal Sintering Furnace for Zirconia Blocks and Alloy Disc and so on.
|Min. Order / Reference FOB Price||1 Piece||US $3,100/ Piece|
|Production Capacity:||210 Sets Per Month|
|Payment Terms:||L/C, T/T, Western Union|
|Furnace||Structure||Heavy duty steel casing Energy efficient Al2O3 fibrous thermal |
|Input Voltage||AC110V -240V|
|Temperature||1200 Max. for < 1hr1100 for continuously heating|
|Processing Tube||Quartz tube 50 x 43 x 450mm (O.D x I.D x Length)|
|Heating Zone||Total heating zone length: 8" (200mm); |
Constant temp. zone: 2.3" (60mm) (+/-1°C)
|Temperature Controller||PID automatic control and auto-tune function. |
30 programmable segments for precise control of heating rate,
cooling rate and dwell time.
Overheating & broken thermocouple protection.
Over temperature protection and alarm allows for operation without attendant(s).
+/- 1 ºC temperature accuracy.
|Heating Elements||Fe-Cr-Al Alloy doped by Mo|
|Digital Vacuum Gauge||Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially|
designed for vacuum measurements with presence of corrosive gases.
Gauge is installed on the vacuum flange (left side) of tube furnace and provides
a wide measure range (10^-5 ~ 1000 torr).
Accurate pressure reading with any mixed gases
|Two Channel Gas|
|Two floating flow meters 16 to 100 mL/min flow rate range|
Three mechanical pressure gauges (mixing tank): -0.1-0.15 MPa, (0.01 MPa/grit)
Vacuum needle valves are made of SS304
Three Pipe fittings for 1/4" pipe (nylon or stainless steel) on the back panel
Compact size: 340Lx300Dx 180H mm ( 13.4"x12"x7")
Net Weight: 14 lbs
|An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for |
preventing or reducing oxidation. Please click the picture below to learn more:
|Vacuum Flanges and Fittings||one Digital vacuum gauge w/ 0.00001 ~ 1000 torr measurement range|
one 1/4" swagelok tube connector
two KF-25 quick clamps
one 600mm length SS vacuum bellows
|Vacuum Pump||Model: EQ-2TW-4C two step high speed vacuum pump|
Voltage: The voltage of pump will be the same as the tube furnace.
Pumping rate: 8CFM, 226L/min
Vacuum level in the furnace system can reach 5x10-2 torr
Power: 3/4 HP (500W)
Oil volume: 1000ml
|Net Weight||100 lbs|
|Product Dimensions||Furnace: 340 x 300 x 400 mm|
Vacuum Pump: 440 x 160 x 300 mm
Gas Station: 340 x 300 x 180 mm
|Warranty||One year limited|