Single Chamber Type Atomic Layer Deposition System (ALD) for The Preparation of Conventional Oxide Films

• Type: Coating Production Line
• Coating: Vacuum Coating
• Certification: CE
• Condition: New
• Sample Table Size: 4-12 Inches
• Substrate Heating Temperature: Rt-400 Oc; ±1 Oc
• Number of Precursors: 4-8
• Precursor Source Pipeline Temperature: Rt-200 Oc; +-1 Oc
• Source Container Temperature: Rt-200 Oc; +-1 Oc
• Transport Package: Standard Export Wooden Box Packaging
• Trademark: CYKY
• Origin: Zhengzhou Henan China
• HS Code: 8412800090
• Production Capacity: 200 Sets Per Month

Product Description

Single Chamber Type Atomic Layer Deposition System (ALD) for the preparation of conventional oxide films


Application of atomic layer deposition system:
It can be used in the preparation of conventional oxide thin films of elemental copper and nickel and TiN;
Can be connected to other vacuum devices such as glove boxes;
Upgradeable CCP system;
Ozone system can be installed, mainly used for silicon oxide, iron oxide and other processes

Product benefit
Advanced software controlling system: many functions are integrated in the system,including technological formulation, parameter setting, popedom stetting ,interlocking alarming ad state supervisory control.

ALD Films
Elementary substance: Co, Cu, Ta, Ti, W, Ge, Pt, Ru, Ni, Fe…
Nitride: TiN, SiN, AlN, TaN, ZrN, HfN, WN …
Oxide: TiO₂, HfO₂, SiO₂, ZnO, ZrO₂, Al₂O₃, La₂O₃, SnO₂…
Others: GaAs, AlP, InP, GaP, InAs, LaHfxOy, SrTiO₃,SrTaO₆…

Application fields of ALD
High-k gate oxides
Storage capacitor dielectrics
High aspect ratio diffusion barriers for Cu interconnects
Pinhole-free passivation layers for OLEDs and polymers
Highly conformal coatings for MEMS applications
Coating of nanoporous structures
Doping of special fiber
Solar battery
Flat plate display
Optical thin-film
Nano film of other special structure

Technical parameters of atomic layer deposition system:

Sample table size	4-12 inches
Substrate heating temperature	RT-400 oC; ±1 oC
Number of precursors	4-8
Precursor source pipeline temperature	RT-200 oC; ±1 oC
Source container temperature	RT-200 oC; ±1 oC
Deposition mode	fast mode, high aspect ratio mode, professional doping mode

Related photos of atomic layer deposition system:

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service.