Customization: | Available |
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After-sales Service: | Online Video |
Warranty: | 1 Year |
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Roll to roll PEVCD is a roll-to-roll tubular furnace system for graphene preparation. The equipment consists of coil to coil copper foil rewinding and placing sealing device, 1200°C tube furnace with three temperature zones and vacuum unit. It can be used for large-scale growth of high quality graphene and other two-dimensional materials. Roll to roll PEVCD applied range: It can be used in screens of computer and cellphone, ultra-light flexible solar cells, new luminescent devices and other film electronics fields. Roll Rto roll PEVCD technical parameters:
Performance specifications and basic configurations | |
Product name | Roll to roll PEVCD |
Product model | CY-OTF-1200X-III-PE300-RR |
1000W Plasma source | Output power:50-1000W Maximum adjustable ±1% RF rate: 13.56MHz,stability±0.005% dB:≤55DB Cooling mode :forced air cooling Input power:1KW AC 220V |
Three proton flow meter control system | Voltage:AC220V/50Hz Power:23W PLC touch screen control Size of mixing tank:φ80*120mm Operating temperature:5~45ºC Maximum pressure: 3x106 Pa Precision : ±1.5% FS Linear: ±(0.5-1.5)%F.S. Repeated accuracy: ±0.2%F.S. Range of flow: The first path : 1~50 SCCM (Methane calibration) The second path: 1~200 SCCM (Hydrogen calibration) The third path: 1~200 SCCM (Argon calibration) Other options are available for gas type calibration according to customer requirements |
Vacuum measure unit | Model:PCG-800 Indication range:3.8E-5 to 1125torr Precision: 5×10-4 … 1×10-3 mbar (N2) % of reading ±50 1×10-3 … 100 mbar (N2) % of reading ±15 100 … 950 mbar % of reading ±5 950 … 1050 mbar % of reading ±2.5 |
Low vacuum unit | It is composed of double-rotating mechanical pump, double-layer vertical oil mist filter (PE material), resistance vacuum gauge and connecting pipe joint Suction rate of vacuum pump≥4.4L/s Limit vacuum degree 10-1Pa Vacuum gauge measuring range 10-1Pa-105 Pa |
Reel-to-reel sealing devices for copper foil |
A cooling device is set between the winding mechanism and the tubular furnace for rapid cooling of copper foil. |
Product size | About 2400*800*1250mm |
Product weight | About 720kg |
Quality certificate | CE certification is optional for electrical components |
Warranty period | Special note: 1. Consumables such as heating element, quartz tube, sample crucible, etc. are not included. 2. Damage caused by corrosive and acidic gases is not covered by the warranty. |
Pictures of PECVD furnace: