Two Zones Css Furnace for Rapid Thermal Processing Upto 5" Dia Wafer at Max. 800° C

• After-sales Service: 1 Year
• Warranty: 1 Year
• Customized: Customized
• Structure: Desktop
• Material: Alloy
• Certification: CE, TUV
• Model NO.: CY-1200X-RTP-II-5
• Application: School
• Type: Heating Type
• Vacuum Flange: Stainless Steel
• Temperature Controller: Digital
• Working Temperature: 800c
• Thermocouple: K Type
• Transport Package: Wooden Box
• Specification: OD. 200mm
• Trademark: CY
• Origin: Zhengzhou, China
• HS Code: 85141090
• Production Capacity: 130 Sets/Month

Product Description

Two Zones CSS Furnace for Rapid Thermal Processing upto 5" Dia Wafer at Max.800°C - OTF-1200X-RTP-II-5
 Introduction
OTF-1200X-RTP-II is a two heating zone rapid thermal processing  furnace with 11" I.D.quartz tube. 
It is designed for PVD or CSS (Close Spaced Sublimation) film coating up to 3" diameter or 2"x2" square. The furnace is heated by two group of halogen heaters (Top and Bottom) separately with max. 20ºC/s heating rate. Two 30 segment precision temperature controllers are built in with +/-1ºC accuracy. RS485 port and control software are included to allow for the operation of furnace and temperature profile logging via PC.  It is excellent tool to research new generation thin film for solar cell, such as CdTe, Sufide and Perovskite solar cell 
 
Specification:

Furnace structure  Vacuum Chamber	Furnace, two temperature controllers, two channel gas flow meters are integrated into a mobile aluminum alloy frame The chamber is made of high purity fused quartz tube Quartz tube size: 11" OD/10.8" ID x 9" H The vacuum flanges are made of Stainless Steel 316
Vacuum Flanges	Top Flange with one KFD-25 vacuum port and one gas outlet (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily Bottom flange has one KFD-25 vacuum port with one gas inlet (1/4" pipe required) with needle valves Flange is sealed by double silicone o-rings and can achieve max. vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by molecular pump One digital vacuum gauge is installed on the top flange.   Precision annti-corrosion digital vacuum gauge is optional at extra cost ( Pic. 2)
Gas Flow Meters	Gas mixer integrated with two float-meters with adjustable measurement ranges of: 16 -160 mL/m 500 - 5000 mL/m (for purging purpose)
Heater and Sample Holder	Two independently controlled heaters with manually adjustable gap from 2 - 30 mm 20 pcs Halogen lamps are used as heating element for rapid thermal processing. Heaters are is made of stainless steel with water cold jacket to reduce heat radiation and allow for fast cooling. 5" dia. circular wafer holder is built into top heater for holding substrate. One set of high thermal-conductive AlN plates (5" Dia. x 0.5mm Thick) are included (place on the back of substrate to make it heat uniformly). A 16L/min recirculating water chiller is included for saving water source
Temperature Controller	Two precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters Each controller has PID auto tune function to protect heaters from overshooting and alarm function to avoid overheating and thermal couple broken PC communication interface & software is installed for (click picture below for details) recording temperature profile shown as below
Working Temperature	Max. temperature for each heaters: <= 800ºC Max. temperature difference between two heaters: <= 300ºC depends on spacing between two heaters: Spacing 30mm        Max. temp difference:  315ºC @ heating bottom only
Heating &Cooling Rate	Heating: > 8ºC/s ( heating single heater only ) Cooling: > 10ºC/s (600 - 100ºC) Max.
Thermal Couple	Two K-type thermal couples are installed on top and bottom heaters separately
Working Voltage	208 - 240VAC, single phase, 20A air breaker
Power Requirement	2200W total ( 1100W for each heater )
Warranty	One year limited with life time support
Dimensions	1085mm L x 680mm W x 1710mm H

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.





Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.