1200c CVD Vacuum Tube Furnace 2 Channel Gas Flowmeter with Vacuum Pump System

• Type: Two Zone Tube Furnace
• Certification: CE
• Structure: Horizontal Type
• Brand: Cyky
• Max. Temperature: 1200c
• Heating Element: Resistance Wire
• Model NO.: CY-CVD-O1200
• Heating Zone: 1 Zone
• Work Temperature: 1100c
• Tube Diameter: 60mm
• Insert Gas: Ar, N2
• Vacuum Pump: Rotary Vane Pump
• Transport Package: Wooden Case
• Specification: two zone tube furnace
• Trademark: CYKY
• Origin: China
• HS Code: 85141090
• Production Capacity: 500 Sets Per Month

Product Description

Laboratory 1200°C CVD Tube Furnace with 4 Channel MFC Gas Mixer and Vacuum Pump CY-O1200-60I-CVD

CY-O1200-60I-CVD is a CE certified splittable single zone tube furnace with 60mm diameter quartz tube, mechanical vacuum pump and four channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-4 types of gases for CVD or diffusion.It is widely used for laboratory thin film preparation. 
 

Model No.	CY-O1200-60I-CVD
Display	LCD Touch Panel
Limiting temperature	1200ºC
Working temperature	≤1100ºC
Heating rate	0-20ºC/min
Heating Zone length	440mm, constant temperature zone:200mm
Quartz tube diameter	OD60*1000mm
Temperature accuracy	± 1ºC
Heating element	Fe-Cr-Al alloy adopt by Mo
Thermal couple	K TYPE
Cooling method	Double layer structure with fan cooling
Temperature control	30 steps programmable PID control
Chamber material	Alumina fiber
Over-temperature alarm	Yes
Over-current alarm	Yes
Sealing flange	S.S vacuum flange
Vacuum pump	Mechanical rotary vacuum pump(optional)
Cooling method	Air cooling
Connection pipe	stainless steel bellows, manual flap valve
Gas Mixer	2 way gas mixer
Accuracy	±2%F.S.
Repeat accuracy	±0.2% FS
Linear precision	±1%F.S.
Working pressure:	-0.1MPa~0.15MPa
MFC1 Range	0~100SCCM
MFC2 Range	0~200SCCM

COMPANY INTRODUCE
Zhengzhou CY Scientific Instrument Co., Ltd.- is a high and new technology enterprise registered in Zhengzhou,Henan province. Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in researching and developing, designing and manufacturing of equipment used in scientific researches.
Our mainly products include high temperature furnace and heating element, like lab muffle furnace, tube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc.