1200º C Two-Zone Rotary Pecvd Tube Furnace with Three-Channel MFC

• Customization: Available
• After-sales Service: Online Support
• Warranty: 1 Year
• Max. Temperature: 1200c
• Heating Element: Resistance Wire
• Heating Zone: 2 Zones
• Work Temperature: 1100c
• Tube Diameter: 60mm
• Insert Gas: Ar, N2
• Vacuum Pump: Rotary Vane Pump
• Heating Zone Length: 200mm
• Gas Flowmeter: Mass Flowmeter
• Flowmeter Range: 500sccm
• Transport Package: Wooden Case
• Specification: two zone tube furnace
• Trademark: CYKY
• Origin: China
• HS Code: 85141090
• Production Capacity: 500 Sets Per Month

Product Description

Laboratory 1200°C CVD Tube Furnace with 4 Channel MFC Gas Mixer and Vacuum Pump CY-O1200-60I-CVD

Product Description

 

This product is a plasma-enhanced rotary chemical vapor deposition system (rotating PECVD). The furnace tube adopts a variable-diameter design. The middle tube diameter is relatively thick and there are mixing partitions, which can repeatedly mix powder or particles with the rotation of the furnace tube.
 

Technical parameters of Rotary PECVD tube furnace:

Dual temperature zone tube furnace	Product model	CY-O1200-60IIC-R
	Equipment power	3KW
	Furnace tube material	High purity quartz
	Furnace tube size	Φ60*420+Φ100*360+Φ60*420mm   (Quartz heteromorphic tube)
	Furnace chamber length	440mm
	Heating zone length	200mm+200mm
	Operating temperature	0~1150ºC
	Limit temperature	1200ºC
	Temperature control accuracy	±1ºC
	Thermocouple type	K-type thermocouple
	Temperature control mode	30-segment program temperature control, PID parameter self-tuning
	Display mode	HD full color LCD touch screen
	Sealing method	304 stainless steel vacuum flange
	Power supply	AC: 220V 50/60Hz
	Rotation speed	0~13rpm
	Tilt angle	0~35°
3-channel mass flow meter	Product model	CY-3Z
	Number of gas paths	3 channels
	Flowmeter type	Mass flowmeter
	Measuring range	A channel: 0~100sccm; B channel: 0~200 sccm; C channel: 0~500 sccm
	Measurement accuracy	±1.5%
	Working pressure difference	0.1~0.5MPa
	Pipeline interface	1/4 inch ferrule connector
	Power supply	AC220V 50/60Hz
Vacuum system	Vacuum pump	Dual stage rotary vane pump
	Pumping speed	1.1L/s
	Pumping port	KF16
	Pump ultimate vacuum	10E-1Pa
	Power supply	AC220V 50/60Hz
RF power supply	Signal frequency	13.56MHz±0.005%
	Power output range	0~500W
	Maximum reflected power	100W
	RF output interface	50Ω, N-Type, female
	Power stability	≤5W

Detailed Photos

Product pictures: 

Company Profile

COMPANY INTRODUCE
Zhengzhou CY Scientific Instrument Co., Ltd.- is a high and new technology enterprise registered in Zhengzhou,Henan province. Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in researching and developing, designing and manufacturing of equipment used in scientific researches.
Our mainly products include high temperature furnace and heating element, like lab muffle furnace, tube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc.
 

After Sales Service

1. Limited Warranty:

   • "This equipment is covered by a limited warranty valid for one year from the date of purchase."

2. Parts and Labor:

   • "The warranty covers both parts and labor for any defects in materials or workmanship."

3. Exclusions:

   • "The warranty does not cover damage caused by misuse, accidents, or normal wear and tear."

4. Service and Repair:

   • "We will provide prompt service and repair for any issues covered under the warranty."

5. Return Policy:

   • "If the equipment is found to be defective within the warranty period, it may be returned for repair or replacement."

6. Software Updates:

   • "The warranty includes free software updates for the duration of the warranty period."

7. Technical Support:

   • "Technical support is available at no additional charge for the warranty period."

8. Installation Assistance:

   • "We offer installation assistance to ensure the proper setup of the equipment."

9. Warranty Registration:

   • "To activate the warranty, customers must register their equipment within 30 days of purchase."

10. Documentation:

    • "Keep the original purchase receipt as proof of warranty eligibility."

11. Transferability:

    • "The warranty is transferable to subsequent owners of the equipment."

12. Extended Warranty:

    • "An extended warranty is available for purchase to provide additional coverage."

13. Terms and Conditions:

    • "The warranty is subject to the terms and conditions outlined in the warranty document."

14. Dispute Resolution:

    • "Any disputes regarding the warranty will be resolved through arbitration or mediation as per the agreement."

15. Warranty Claim Process:

    • "To file a warranty claim, contact our customer service department with the equipment's serial number and a description of the issue."