Customization: | Available |
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Accuracy of Film Thickness: | +-0.5% |
Measurement Speed: | 100ms-1s / Time, Can Be Set |
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Product name | EQ-TM106 film thickness monitor | ||
Product model | EQ-TM106 | ||
Main features | 1. This machine can be connected to a computer. 2. The display has the advantages of simple interface, intuitive, reasonable, convenient and fast operation, etc. It can visually display the measured film thickness, rate, frequency, percentage of PWM control output and other working states. 3. You can set the gating time, output mode, rate algorithm, material parameters, output range and communication parameters through software or display instrument, and write the related data to Excel file. 4. It has the advantages of ultra-small size, high measurement accuracy, simple operation and convenient use. |
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Technical parameters |
EQ-TM106-1 monitoring module 1. Power supply: DC 5V (± 10%), maximum current 400mA 2. Frequency resolution: ± 0.03Hz 3. Film thickness resolution: 0.0136Å (aluminum) 4. Accuracy of film thickness: ± 0.5%, depends on process conditions, especially the position of the sensor, material stress, temperature and density 5. Measurement speed: 100ms-1s / time, can be set 6. Measuring range: 500000Å (aluminum) 7. Standard sensor crystal: 6MHz 8. Computer interface: RS-232 / 485 serial interface (baud rate 1200, 2400, 4800, 9600, 19200, 38400 can be set, data bit: 8, stop bit: 1, check: none) 9. Analog output: 8-bit resolution, PWM pulse width modulation output (open collector or internal 5V output) 10. Working environment: temperature 0-50 ºC, humidity 5% -85% RH, no condensed water beads 11. Dimensions: 90mm × 50mm × 18mm |
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EQ-TM106-2 display instrument 1. Input power: AC 220V ± 10% 2. Output power: DC 5V 3A 3. Display: 12 × 2 digital tube and LED 4. Communication port: RS-485 (baud rate 1200, 2400, 4800, 9600, 19200, 38400 can be set, data bit: 8 bit, stop bit: 1 bit, parity: none) 5. Dimensions: 182mm × 65mm × 160mm |
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EQ-TM106-3 probe 1. Applicable chip frequency: 6MHz 2. Applicable chip size: Ø14mm 3. Mounting flange: CF35 4. Cooling water pipe: Ø3mm, length 300mm, 500mm, 1000mm 5. Cooling water pressure: <0.3MPa 6. Pneumatic baffle road tube: Ø3mm 7. Compressed air pressure: <0.8MPa,> 0.5MPa 8. Baking temperature: water-passing state <200 ºC, no water-passing flange <100 ºC 9. Electrical interface: BCN socket |
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Standard accessories | 1 | EQ-TM106-1 monitoring module | 1 |
2 | EQ-TM106-2 display instrument | 1 set | |
3 | EQ-TM106-3 probe | 1 |