| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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Plasma-enhanced chemical vapor deposition (PECVD) is a type of chemical vapor deposition characterized by the use of plasma activation at low temperatures to enhance the chemical vapor deposition reaction. The advantages of this method are that the deposition temperature is low, the deposition rate is fast, and the film produced has excellent electrical properties, good substrate adhesion and excellent step coverage.
PECVD vapor deposition application areas:
Plasma enhanced CVD systems can be used in: graphene preparation, sulfide preparation, nanomaterials preparation and other test sites. A variety of films such as SiOx, SiNx, amorphous silicon, microcrystalline silicon, nano -silicon, SiC, diamond-like, etc. can be deposited on the surface of flake or similar shape samples, and P -type and N-type doped films can be deposited. The deposited film has good uniformity, compactness, adhesion and insulation. Widely used in cutting tools, high-precision molds, hard coatings, high-end decoration and other fields, PECVD vapor deposition has a wide range of applications in ultra -large scale integrated circuits, optoelectronic devices, MEMS and other fields.
Technical data of PECVD:
| Vacuum Tube Furnace | Model | CY-PECVD50-1200-Q |
| Total Power | 3kw | |
| Tube material | High purity quartz | |
| Tube diameter | 50mm | |
| Tube length | 1200mm | |
| Furnace chamber length | 440mm | |
| Heating zone length | 200mm+200mm | |
| Operating temperature | 0~1150ºC | |
| Thermocouple | K type | |
| Temperature control accuracy | ±1ºC | |
| Temperature control mode | 30 segment program temperature control | |
| Display mode | LED (highlight digital tube display) | |
| Sealing method | 304 stainless steel vacuum flange | |
| Flange interface | 1/4" cutting sleeve joint (Ø8 pagoda joint) | |
| Rotary Speed | 0-13rpm | |
| Vacuum | 4.4×10E-3Pa | |
| Power supply | AC:220V 50/60Hz | |
| Gas System | Model | TN-3F |
| Gas channel | 3-channel | |
| Measuring unit | Mass flow meter | |
| Measuring range | A channel: 0~200sccm H2 gas | |
| B channel: 0~200sccm N2 gas | ||
| C channel: 0~500sccm Ar gas | ||
| measurement accuracy | ±1.5% | |
| Pipe pressure resistance | 3MPa | |
| Working pressure difference | 0.1-0.5Mpa | |
| Connecting pipe | 304 stainless steel | |
| Gas channel | 304 stainless steel needle valve | |
| Interface specification | 1/4" cutting sleeve joint for gas inlet and outlet | |
| Vacuum System | Mechanical pump | Rotary vane vacuum pump |
| Pumping rate | 1.1L/S | |
| Exhaust interface | KF16 | |
| Vacuum measurement | Pirani gauge | |
| Ultimate vacuum | 1×10E-1Pa | |
| Power supply | AC:220V 50/60Hz | |
| Pumping interface | KF40 | |
| RF Power Supply | Frequency | 13.56Mhz |
| Output | 0-500W | |
| Max. reflected power | 100W | |
| Connection | 50Ω,N-Type,female |
1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.
2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is available.
3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is available.
4. Tube Material: quartz, corundum, alloy, and other material of tube is customization.
5. Tube with different diameter and length is customization.
6. Plasma generator: 150W, 300W, 500W, 1000W, and other power of plasma generator is customization.
7. Flow meter: 1~3 or multi channel flow meter is optional based on your process.
8. Customized CVD/PECVD system according to your reswarch process is available.
We can ship the PECVD reactor by air by sea, also can arrange shipment according to your requirements.
Zhengzhou CY Scientific Instrument Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
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