Customization: | Available |
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Cleaning Process: | Vapor Cleaning |
Style: | Mobile Style |
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Model | CY-P10L-B |
Working current: | Total working current not higher than 2A (Not include the vacuum pump) |
Chamber | High purity quartz tube |
RF frequency | 13.56MHz |
RF power | 200-400W |
Frequency offset | <0.4KHz |
Vacuum degree | 60Pa-100Pa |
Cleaning time | 1-6000s adjustable |
Gas flow | >10-100ml |
Process Control | manually/automatic |
Power | 10-100%adjustable |
Cleaning capacity | 10L |
Exhaust pipe | KF vacuum flange+vacuum aluminum pipe |
Vacuum Pump | Bipolar direct rotary vane pump |
Impedance matching | automatic |
Display | LCD |
Power supply | AC 220V 60Hz |