Customization: | Available |
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Customized: | Customized |
Structure: | Desktop |
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Product | CY-1200CVD system |
Chamber Type | Split Chamber |
Display | LED digital display |
Chamber Material | Alumina Fiber |
Heating Element | Resistance wire |
Max Temperature | 1200°C |
Usable Range | ≤1100°C |
Heating Rate | ≤20°C(suggestion:10°C/min) |
Heating Zone | Single |
Heated length | 220mm |
Length constant temperature | 100mm |
Tube Material | High purity quartz |
Tube Size | Φ50mm x700mm |
Vacuum Seal | 1.03×10-3Pa |
Temperature Control | PID automatic control via SCR power control |
Accuracy | ±1°C |
Preset curve | 10 |
Thermocouple | K Type |
Working Voltage | 220V 50Hz~60Hz |
Max. Power | 1.8KW |
Gas Channels | 3 gas channels (can be designed as your requirement) |
Gas controller | MFCS with range of 0 -500 sccm |
Vacuum pump | 10 Pa Rotary vacuum pump 10(-4) Pa high vacuum pump system |