Laboratory Quality 5L Plasma Cleaner with Capacitive Coupling for Surface Etching

• Type: Generator
• Feature: Plasma
• Certification: CE, TUV
• Condition: New
• Customized: Customized
• Transport Package: Ply Wooden Carton
• Model NO.: CY-P5L-300W
• Specification: 600mm*650mm*560mm
• Trademark: CYKY
• Origin: Zhengzhou, China
• HS Code: 8486204100
• Production Capacity: 20 Sets/Month

Product Description

Laboratory quality 5L plasma cleaner with capacitive coupling for surface etching

Plasma cleaner is a new high-tech technology that uses plasma to achieve effects that cannot be achieved by conventional cleaning methods. Plasma is a state of matter, also called the fourth state of matter, and it is not the common three states of solid, liquid and gas. Apply enough energy to the gas to ionize and become a plasma state. The "active" components of plasma include: ions, electrons, atoms, active groups, excited nuclides (metastable states), photons, etc. The plasma cleaner uses the properties of these active components to treat the surface of the sample, so as to achieve the purpose of cleaning, coating, etc.
5L Plasma Cleaner Features:
The chamber has a large usable area, uniform glowing, and can clean 6-inch silicon wafers.

5L Plasma Cleaner Technical Parameters:

Main parts	Item	Parameters
Cleaning chamber	Chamber material	SS304
	Chamber size	200x160x240mm
Coupling method	Capacitive coupling
RF power supply	Power supply features	The power supply is an all-solid-state RF power  supply, and adopts a high-stability and high-reliability power amplifier module and a DC module, which effectively ensures the RF power output of the power supply. High quality electronic components are used to ensure the reliability of the products.
	Power advantages	Long time normal operation  Simple and flexible operation  High power supply efficiency and low heat generation With perfect reflection power protection function
	RF power	0~300W continuously adjustable
	Signal frequency	13.56MHz ±0.005%
	Reflected power	≤100W
	Power stability	±0.1%
	RF connector	N type connector
	Machine efficiency	≥75%
	Harmonic component	≤-50 dBc
	Cooling method	Forced air cooling
Gas measurement	Measuring unit	Two-channel mass flow meter Ar 0~200sccm; O2 0~200sccm, customizable Other parameters refer to previous products
Vacuum	Vacuum measurement	Digital vacuum gauge (resistance gauge)
	Vacuum pump	Two-stage rotary vane vacuum pump
	Motor speed	50 Hz: 1440; 60 Hz: 1720
	Pumping rate	50 Hz: 240L/Min; 60 Hz: 288L/Min
	Vacuum range	0.1Pa~10000Pa
	Ultimate vacuum	0.5Pa
	Motor noise	≤56dB
	Pipe interface	Gas inlet: KF16; exhaust port KF16.
	Connecting pipe	KF16 vacuum bellows
	Vacuum valve	KF16 ball valve
	Motor Power	400W
Others	Power supply	AC220V 50/60Hz
	Total power	800W
	Operating temperature	-10ºC--40ºC
	Working vacuum	≤40Pa
	Overall size	600mm×650mm×560mm
	Total Weight	80kg (including packaging)

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

 More questions, please contact customer service