Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator

Product Details
Customization: Available
Customized: Customized
Structure: Desktop
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  • Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator
  • Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator
  • Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator
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Basic Info.

Model NO.
CY-RF
Material
Alloy
Certification
CE, TUV
Application
School
Type
Reaction Type
Matching
Automatic
Cooling
Air
Output Type
N Type
RF Frequency
13.56MHz
Warranty
One Year
Transport Package
Wooden Box
Specification
500W
Trademark
CY
Origin
Zhengzhou, China
HS Code
85141090
Production Capacity
250 Sets Per Month

Product Description

RF generator used in PECVD system
Introduction

13.56MHz RF generator upto 500W for DIY of PECVD (Plasma Enhanced Chemical
Vapor Deposition) for Plasma etching, Plasma cleaning, plasma polymerization etc.


SPECIFICATIONS

 
Noise <50 dB
Output Power 5 -500W adjustable with ± 1% stability ( the power can be designed as your requirement)      
RF frequency 13.56 MHz ±0.005% stability
Reflection Power 200W max.
Matching Automatic
RF Output Port 50 Ω, N-type, female
Cooling Air cooling
Power 208-240VAC, 50/60Hz
Tube Size 50 - 130 mm ( 2''- 5'' OD)  ( larger diameter coil up to 11" diameter is available upon request )
Application Combine with  tube furnace to get PECVD system
other details can be desigbed as your requirement
Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF GeneratorLaboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF GeneratorLaboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF GeneratorLaboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator
Factory

Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Our main products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,CVD system and customized lab equipment.Welcome you come to visit us. 


Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator
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Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator

 

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