Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator

• Customization: Available
• Customized: Customized
• Structure: Desktop
• Model NO.: CY-RF
• Certification: CE, TUV
• Application: School
• Type: Reaction Type
• Matching: Automatic
• Cooling: Air
• Output Type: N Type
• RF Frequency: 13.56MHz
• Warranty: One Year
• Transport Package: Wooden Box
• Specification: 500W
• Trademark: CY
• Origin: Zhengzhou, China
• HS Code: 85141090
• Production Capacity: 250 Sets Per Month

Product Description

RF generator used in PECVD system
Introduction
13.56MHz RF generator upto 500W for DIY of PECVD (Plasma Enhanced Chemical
Vapor Deposition) for Plasma etching, Plasma cleaning, plasma polymerization etc.

SPECIFICATIONS
 

Noise	<50 dB
Output Power	5 -500W adjustable with ± 1% stability ( the power can be designed as your requirement)
RF frequency	13.56 MHz ±0.005% stability
Reflection Power	200W max.
Matching	Automatic
RF Output Port	50 Ω, N-type, female
Cooling	Air cooling
Power	208-240VAC, 50/60Hz
Tube Size	50 - 130 mm ( 2''- 5'' OD)  ( larger diameter coil up to 11" diameter is available upon request )
Application	Combine with  tube furnace to get PECVD system
other details	can be desigbed as your requirement

Factory

Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Our main products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,CVD system and customized lab equipment.Welcome you come to visit us. 


Exhibition