| Customization: | Available |
|---|---|
| Type: | CVD Film Preparation |
| Certification: | TUV |
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| Name | 1200ºC Double Tube Single/Multi zone Slide CVD System | ||||
| Model No. | CY-O1200-100IT-S3ZD | CY-O1200-100IIT-S3ZD | CY-O1200-100IIIT-S3ZT | ||
| Max Temper | 1200ºC | ||||
| Heating zone | 420mm | 610mm | 940mm | ||
| Constant zone | 210mm | 400mm | 700mm | ||
| Heating zone | Single zone | Double zone | Three zone | ||
| Quartz diameter | Inner diameter:Φ80mm Outer diameter:Φ100mm | ||||
| Rated power | 2.5Kw | 4.8Kw | 7.2Kw | ||
| Rated voltage | 220V | 220V | 380V(three phase) | ||
| Sliding distance | 290mm | 485mm | 650mm | ||
| Sliding method | Manual/Auto programmable control | ||||
| Temperature control | PID Programmable control, 30 steps curves | ||||
| Temperature accuracy | ±1ºC | ||||
| Double Tube Sealing Flange | Adopt double flange extensible multi-function double clamp connection,and independently inner tube and outer tube for vacuum and gas flow control. | ||||
| Gas Control Method | Mass Flow Controller | ||||
| Gas way | 3 gas way | ||||
| Flow speed range | 0-500sccm, or as customized | ||||
| Accuracy | ±1%F.S | ||||
| Response time | ≤4sec | ||||
| Working surrounding temperature | 5-45ºC | ||||
| Working pressure | Inlet Pressure 0.05-0.3Mpa | ||||
| Vacuum range | 10Pa-100Pa | 1x10-3Pa-1x10-1Pa | |||
| Vacuum pump | Double stange mechanical pump, Vacuum:3x10-1Pa, Pump speed:4L/S, |
Turbo pump set Vacuum:5x10-6Pa Pumping speed:1600L/S |
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| Outer dimension | 530×1440×750mm | 530×1440×750mm | |||
| Gross weight | 240Kg | 340Kg | |||
PLY WOOD BOX as below picture show. or as customer request.
Shipping and transportation
As customer request. Generally, Our mode of transport are as by sea, by air or rail transport
Warranty
Main product is 15 month, except wearing parts.
Company Information
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Welcome you come to visit us for business inspection.
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