Mini Compact Desktop Magnetron Plasma Sputtering Coater

• Type: Coating Spray Gun
• Coating: Vacuum Coating
• Substrate: Ceramic
• Certification: CE, TUV
• Condition: New
• Vacuum Chamber: High Purity Fused Glass
• Model NO.: CY-1100X-SPC-12
• Sample Stage: Dia.40mm
• Control Panel: Touch Screen Panel
• Warranty: One Year
• Transport Package: Wooden Box
• Specification: dia. 40mm
• Trademark: CY
• Origin: Zhengzhou
• HS Code: 8543709990
• Production Capacity: 210 Sets Per Month

Product Description

Mini Plasma Sputtering Coater with Vacuum Pump & Gold Target, 1.5" Max Sample - CY-1100X-SPC12-LD
 
CY-1100X-SPC12-LD is a compact plasma sputtering coater designed for making metallic coatings, such as gold, platinum, Indium and silver etc. Especially for coating conductive gold film for SEM sample. The plasma sputtering coater is shipped with all necessary accessories for immediate use, including one sputtering head with gold sputtering target (gold cathode), vacuum pump, stainless steel bellows and quick clamps.
 

Input Power	Single phase 208 - 240 VAC, 50 / 60 Hz < 1000 W (including vacuum pump)
Vacuum Chamber	Vacuum chamber: 100 mm ID x 130 mm H, made of fused glass Sealing flange made of stainless Needle valve on front panel for gas flow control
Sample Stage	Stage size: 40 mm Dia. Sputtering distance range: 15 - 80 mm adjustable
Control Panel	Vacuum gauge and sputtering current meter for monitoring deposition Needle valve on front panel for gas flow control Sputtering timer: 0 - 110 s adjustable
Vacuum Pump	The followings are included:  156 L/m Double Stage Rotary Vane Vacuum Pump with vapor trap (Max vacuum 10^-2 Torr) Stainless steel bellows with KF16 adapter and quick clamps Two Stage Exhaust Filter on vacuum pump to eliminate oil vapor contamination One High purity Au target (57 mm Dia. x 0.12 mm, 4N purity) Optional: you may use a turbo pump to achieve 10^-4 Torr vacuum by a turbo pump
Sputtering Targets	Target size requirements: 57 mm Dia. x 0.5 mm max 4N purity gold foil: 57 mm Dia. x 0.12 mm (Included and pre-installed on coater)  Optional Targets are available  Au target (57 mm Dia. x 0.12 mm, 4N purity)  Pt target (57 mm Dia. x 0.12 mm, 4N purity)   Ag target (57 mm Dia. x 0.5 mm, 4N purity)
Size	480 mm L x 320 mm W x 280 mm H
Net Weight	20 kg
Shipping Weight	55 kg (120 lbs) with 1020 mm x 790 mm x 560 mm (40" x 31" x 22")
Compliance	CE approval