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Zhengzhou CY Scientific Instrument Co., Ltd.

Atmosphere Furnace, Atmosphere Chamber Furnace, Vacuum Furnace manufacturer / supplier in China, offering 7.6 Liter High Vacuum Atmosphere Chamber Furnace with Feedthrough Flange, Rapid Thermal Processing Furnace for Close Spaced Sublimation Film Coating, Anti-Corrosion PP Spin Coater (8000 RPM & 6" wafer Max.) with Complete Accessories and so on.

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Supplier Homepage Product Lab Heating Equipment Others Lab Heating Equipment 7.6 Liter High Vacuum Atmosphere Chamber Furnace with Feedthrough Flange

7.6 Liter High Vacuum Atmosphere Chamber Furnace with Feedthrough Flange

FOB Price: US $3,800-4,500 / Piece
Min. Order: 1 Piece
Min. Order FOB Price
1 Piece US $3,800-4,500/ Piece
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Port: Zhengzhou, China
Production Capacity: 500 Sets Per Month
Payment Terms: L/C, T/T, Western Union

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Basic Info
  • Model NO.: CY-VBF-1200X-H8-UL
  • Customized: Customized
  • Structure: Desktop
  • Type: Muffle Furnace
  • Trademark: CYKY
  • Specification: 7.6 Liter Vacuum Atmosphere Chamber Furnace
  • HS Code: 85141090
  • Application: School, Lab
  • Certification: CE
  • Material: Stainless Steel
  • Item Name: 7.6 Liter Vacuum Atmosphere Chamber Furnace
  • Transport Package: Wooden Case
  • Origin: China
Product Description
7.6 Liter Vacuum Atmosphere Chamber Furnace with feedthrough flange 

Description of the vacuum atmosphere chamber furnace:
CY-VBF-1200X-H8 is a UL/CSA standard vacuum furnace. It equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of 10-2 to10-5 Torr through a mechanical or molecular vacuum pump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature up to 1100°C. It also can also be used as vacuum brazing furnace for fusing small parts.

Specification of the vacuum chamber furnace with quartz chamber:
Power3 KW max.

Voltage

Single phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed)
Note: Power cable included, but without the plug. Please install a plug by your own or click link below picture to choose a plug according to your country or your lab requirement


Working Temperature

  • <= 1000 °C continuously

  • Max. 1100 °C, < 30 minutes
  • Temperature Uniformity: +/- 2°C

Heating Rate

  • Max. 20°C/ min
  • Recommended. 10°C/ min

Heating Elements

High-quality Ni-Cr-Al resistance wire as heating elements and can be heated up to 1200°C.

Quartz Tube Size & Effective Heating Area

  • Tube size: 8" O.D. x 7.5" I.D x 13.4" L.

  • Heating area: 7.5" ID x 8.5" Depth (7.6Liter)

  • Uniform Temperature zone: 4"dia x 3.5" depth in center position within +/- 5ºC

  • Quartz tube is replaceable 

Optionals
  • Sample holder is not provided with the furnace. You may check the link below to order the sample holder separately.
  • Optional Quartz Thermal Block is available upon request as the refractory block, quartz block can help achieve higher vacuum level and avoid potential contamination problems, please order Quartz Thermal Block.
  • Optional 4 wires ( Pt ) feedthrough is available upon request for electrical properties measurement at the high temperature at extra cost.

Flat sample holder Crucible sample holder Quartz Thermal Block 4 wires feedthrough
Gas Inlet and Outlet
  • One gas purging inlet (1/4" hose adapter ) with a valve is on the left side of the furnace .
  • The inert gas can be introduced into the chamber via the inlet for purging purpose.
  • If a continuous gas flow is needed, refer to the additional gas inlet and thermocouple probe below.

(Attention: we does not recommend using its products under hazardous conditions. We will not be liable for any damages incurred under hazardous conditions. Tube furnaces with quartz tubes are designed for use under vacuum condition and at low-pressure levels < 0.2 bars ( 3 PSI ).)
Water Cooling
 
A water cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting at over 300°C. The inlet and outlet ports located on the left side of the furnace are used for connecting to a water chiller through two 12 mm Dia. polyurethane tubes (water chiller is sold separately).

 

Pressure Measurement / Monitoring

  • Mechanical Vacuum Gauge (included as standard accessory), which ranges from -0.1 to 0.15Mpa.
  • Digital Pressure Gauge (optional) A gas-type independent(above 10mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. Aside from greater measurement precision, this gauge reduces risks of chamber explosions caused by the incorrect reading of gas pressures due to gas-type dependency.



Vacuum Pressure




 

  • Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials etc. By using KFD25, stainless steel pipe, our two stage mechanical pump and KF25 Ball valve, the furnace can achieve vacuum levels below:
    • 10 mtorr (10-2 torr)via mechanical pump within 30 minutes withoutThermal Block
    • 60 mtor(6x10-2 oTorr ) via mechanical pump within 30 minutes with the Quartz Thermal Block at 900C
  • Optional:
    • Vacuum pump and pipe are not included, please click on BOLD or picture on the optional part below to order.
    • For achieving a higher vacuum level, a Turbomolecular Vacuum Pump Station is necessary. 
    • Spare sealing O-ring is available at extra cost 
    • KF25 Right-Angle Valve for quick connection to KF25 Bellows


Temperature Controller

 

  • PID automatic control and auto-tune function.
  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communication Port.
    • Advanced Temperature Control (Optional)
    • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit.
    • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. 

Gas Mixing System (optional)

You may choose a gas mixer to deliver multiple gases with control over gas composition and flow rate (click pictures below to order separately).

Overall Dimensions
 

700mm(L) x 440mm(W) x 435mm(H)

 

Net Weight

80 kg

Shipping Weight

200 lbs

Shipping Volume

45"(L) x28"(W) x35"(H)

 

reference picture of the high vacuum chamber furnace:
7.6 Liter High Vacuum Atmosphere Chamber Furnace with Feedthrough Flange
7.6 Liter High Vacuum Atmosphere Chamber Furnace with Feedthrough Flangeother related atmosphere furnace:
7.6 Liter High Vacuum Atmosphere Chamber Furnace with Feedthrough Flange7.6 Liter High Vacuum Atmosphere Chamber Furnace with Feedthrough Flange


 
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