Slidable Pecvd Split Tube Furnace for Fullerene Graphene Growth

• Customized: Customized
• Structure: Desktop
• Material: Stainless Steel
• Certification: CE, TUV
• Application: School
• Type: Heating Type
• Model NO.: CY-PECVD- E
• RF Frequency: 13.56MHz
• Matching: Automatic
• Reflection Power: 200W
• Warranty: One Year
• Transport Package: Wooden Box
• Specification: OD. 50mm 1000mm
• Trademark: CY
• Origin: Zhengzhou, China
• HS Code: 85141090
• Production Capacity: 150 Sets Per Month

Product Description

Plasma Enhanced Chemical Vapor Deposition  PECVD furnace used for CVD graphene growth    
Introduction
 CY-PECVD- E is an affordable and compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system with auto slidable mechanism. It consists of a 300W RF plasma generator, a 2"O.D split tube furnace and the integrated slidable rail which allows you preheat and slide the furnace to the sample zone in order to get your sample an instant exposure under high temperature. This system can be updated to advanced model with optionals.  It is ideal tool for  the researcher to make innovation under limited budget.
It can be used to do   a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
 Specification

Auto slidable Split Tube furnace	Input power: 208 - 240V AC, 1.2kW 1200°C Max. working temperature for < 60 minutes 1100°C Max for continuous heating High purity quartz tube 2"OD x 1.7"ID x  39.4" Length  30 segments programmable precision digital temperature controller 8" (200mm), single zone. 2.3" (60mm)  (+/-1°C) @ 1000°C  The tube furnace part is a auto sliding RTP tube furnace, and equipped with touch screen controller for easy operation. The sliding speed can be controlled with the auto sliding control.
Plasma RF Generator	Output Power:          5 -300W adjustable with ± 1% stability RF frequency:          13.56 MHz ±0.005% stability Reflection Power:      200W max. Matching:                 Automatic RF Output Port:        50 Ω, N-type, female Noise:                      <50 dB.  Cooling:                    Air cooling. (water cooling is available upon request, and a water chiller can be ordered separately) Power :                     208-240VAC, 50/60Hz
Vacuum Flange and Fittings	Vacuum flange set is made of stainless steel 304.  Left flange assembly includes a KF-25 vacuum port,  two KF-25 quick clamp,a KF-25 right angle valve, a KF-25 vacuum bellows, a flange support 1/4 O.D hose fitting, and a needle valve. Right flange assembly includes a digital pirani gauge, 1/4 O.D tube fitting, 1/4" feedthrough and a needle valve.
Vacuum Pump	AC 220V 50 Hz  1/2HP  375W 2 Liter /S  or 120 liter/m  Oil trap (inlet) and exhaust filter (outlet) are installed. Max. vacuum:  10-6 torr with turbo pump For the vacuum degree less than 0.1 pa please choose the vane rotary vacuum pump 760 torr.
Product Dimensions	Net weight: 350 lbs Shipping weight: 480 lbs
Optional	Please choose below gas delivery systems based on your budget  Low cost Compact Anti-Corrosion Three Channel Gas Mixer Compact Liquid Vaporization Systems Three Channels MFC Gas Control System  Constant temperature control module
Warranty	One year limited warranty with lift time support (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
Compliance	CE Certified Temperature controller is MET and CE Certified
Warning	The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure) rizing the furance chamber and ensure a safe operation.

 


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Factory

Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Our main products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,CVD system and customized lab equipment.Welcome you come to visit us. 


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