3 Heads Compact RF Plasma Magnetron Sputtering Coater for Thin Film Coating

• After-sales Service: Online Video
• Warranty: 1 Year
• Customized: Customized
• Structure: Desktop
• Material: Steel
• Certification: CE
• Model NO.: CY-VTC-3RF
• Application: School, Lab
• Type: Plasma
• Input Power: 220 VAC, 50 / 60 Hz
• Power Source: 13.5 MHz, 100 W RF Generator
• Sputtering Distance Range: 50 - 80 mm Adjustable
• Size: 540 mm L X 540 mm W X 1000 mm H
• Net Weight: 60 Kg
• Transport Package: Ply Wooden Carton
• Trademark: CYKY
• Origin: Zhengzhou, China
• HS Code: 8486109000
• Production Capacity: 20 Sets/Month

Product Description

 VTC-3RF is a three head 1" RF Plasma magnetron sputtering system designed for non-metallic thin film coating, mainly for multilayer oxide thin films. It is the most cost-effective coater for researching in the new generation of oxide thin films. DC magnetron sputtering option is available upon request for metallic film deposition, enabling three DC, one RF / two DC, and two RF / one DC sputtering head configurations.

SPECIFICATIONS

Input Power	·Single phase 220 VAC, 50 / 60 Hz ·1000 W (including vacuum pump and water chiller)
Power Source	·13.5 MHz, 100 W RF generator with manual matching is included and connected to the sputtering heads ·Load range: 0 - 80 adjustable. Tuning range: -200j - 200j adjustable ·The rotatable switch can activate one sputtering head at a time. Sputtering heads can be switched "in the plasma" (no breaking of vacuum and plasma during a multilayer process) ·With a DC power supply, the coater can be easily modified into 1" DC sputtering sources for metallic film deposition, enabling three DC, one RF / two DC, and two RF / one DC sputtering head configurations  ·Optional 300 W auto-match RF generator is available at extra cost
Magnetron Sputtering Head	·Three 1" magnetron sputtering heads with water cooling jackets are included and inserted into quartz chamber via quick clamps ·RF cable replacement can be purchased at CYKY ·One manually operated shutter is built on the flange ·One 10 L/min digitally controlled recirculating water chiller is included for cooling sputtering heads
Sputtering Target	·Target size requirement: 1" diameter x 1/8" thickness max ·Sputtering distance range: 50 - 80 mm adjustable ·Sputtering angle range: 0 - 25° adjustable  ·1" diameter Cu target and Al2O3 target are included for demo testing ·Various oxide 1" sputtering targets are available upon request at extra cost ·For target bonding, 1 mm and 2 mm copper backing plates are included.
Vacuum Chamber	·Vacuum chamber:  256 mm OD x 238 mm ID x  276 mm Height, made of high purity quartz ·Sealing flange: 274 mm Dia. made of Aluminum with high-temperature silicone O-ring ·Stainless steel shield cage is included for 100% shielding of RF radiation from the chamber ·Max vacuum level: 1.0E-5 Torr with optional turbo pump and chamber baking
Sample Holder	·Sample holder is a rotatable and heatable stage made of ceramic heater with stainless steel cover ·Sample holder size: 50 mm Dia. for. 2" wafer max ·Rotation speed: 1 - 10 rpm adjustable for uniform coating ·The holder temperature is adjustable from RT to 600 °C max (5 min max at 600 °C; 2 hr max at 500 °C) with accuracy +/- 1.0 °C via a digital temperature controller
Vacuum Pump	·KF40 vacuum port is built in for connecting to a vacuum pump. ·Vacuum level: 1.0E-2 Torr with included dual stage mechanical pump 1.0E-5 Torr with optional turbo pump
Size	540 mm L x 540 mm W x 1000 mm H
Net Weight	60 kg
Compliance	CE approval
Warranty	One years limited warranty with lifetime support

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.





Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.