3 Rotary Target Plasma Sputtering Coater with Substrate Heater

• Type: Coating Spray Gun
• Coating: Vacuum Coating
• Substrate: Ceramic
• Certification: CE, TUV
• Condition: New
• Vacuum Chamber: High Purity Quartz
• Model NO.: CY-VTC-16-3HD-LD
• Control Panel: Touch Screen
• Sputtering Distance: 25-40mm
• Shield: Stainless Steel
• Warranty: One Year
• Transport Package: Wooden Box
• Specification: da. 50mm
• Trademark: CY
• Origin: Zhengzhou, China
• HS Code: 85141090
• Production Capacity: 310 Sets Per Month

Product Description

3 Rotary Target Plasma Sputtering Coater w. Substrate Heater (500°C) Including
3 Targets - VTC-16-3HD-LD
Introduction of rotary target coater
VTC-16-3HD-LD is a CE certified compact three rotary target plasma sputtering coater
with a touch screen digital controller, and a substrate heater capable of heating up to
500 °C. It can coat 1- 3 types of metallic materials to sample with diameter up to 50 mm.
Three sputtering targets: gold, silver, copper are included for immediate use.
Technical parameter of rotary target coater

Input Power	Single phase 220 VAC, 50 / 60Hz 700 W (including vacuum pump) For using 110V AC, we will include a transformer for you. Please select the voltage in the Product Options
Output Power	1600 VDC 40 mA max
Vacuum Chamber	Vacuum chamber: 150 mm ID x 150 mm H, made of high purity quartz Sealing flange made of stainless steel with flat O-ring
Sample Stage with Heater	Stage size: 50 mm Dia. Sputtering distance range: 25 - 40 mm adjustable Rotatable stage with three sputtering positions (controlled by the touch screen) Substrate heater is built-in with a maximum heating temperature of 500 °C PID temperature controller with +/- 1 °C accuracy is integrated to the touch screen
Control Panel	6" color touch screen with PLC integration for easy operation Vacuum gauge, sputtering current meter, and substrate temperature control are integrated to the touch screen panel Adjustment knobs on the front panel for gas intake and sputtering current control Sputtering position, sputtering timer, and process logging are accessible from the touch screen
Shield	Stainless steel shield cage is included for extra protection
Sputtering Targets	Target size requirements: 47 mm Dia. x 2.5 mm max
Vacuum Pump (Optional)	Built-in KF25 vacuum port for connecting to a vacuum pump Vacuum pump with KF25 connector is required, but not included. User may choose A double stage mechanical vacuum pump for vacuum up to 10^-2 Torr Or a turbo pump for vacuum up to 10^-4 Torr Vacuum pump can be plugged in the power outlet on the left of coater for automatic control
Dimensions	440 mm L × 330 mm W × 455 mm H
Net Weight	50 kg