• Compact High Resolution Thin Film Thickness Measurement System
  • Compact High Resolution Thin Film Thickness Measurement System

Compact High Resolution Thin Film Thickness Measurement System

Customized: Customized
Structure: Portable
Material: Stainless Steel
Certification: CE, TUV
Application: School, Lab
Type: Measurement Type
Customization:
Diamond Member Since 2016

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Basic Info.

Model NO.
CY-EQ-TM106
Thickness Range
0.0 - 999.9nm
Crystal Frequency
6MHz
Measurement Speed
1 - 10 Time / S
Display
LED
Film Thickness Resolution
0.10 Å
Warranty
One Year
Transport Package
Wooden Box
Trademark
CY
Origin
Zhengzhou, China
HS Code
85141090
Production Capacity
1100 Sets Per Month

Product Description

Compact High Resolution Film Thickness Monitor and Controller --- EQ-TM106
Introduction

The single channel Compact High Resolution Thickness Monitor /  Controller are based on the principle that the oscillating frequency of a quartz crystal is changed by the mass of a deposited film on its upper face. Electronically measuring this effect allows for a determination of the thickness of a deposited film. Once the density of the evaporated material is entered into the system, the thickness is measured to a resolution of 0.1 Å on a  digit LED display having a range of 0-999.9 nanometers. The crystal and holder are mounted in the vacuum chamber and connected to  control box  via the supplied CF25 vacuum feedthrough.
 Specification
Input Power AC 110V  or 220V,  50/60 Hz, < 200W
Crystal Frequency 6 MHz with resolution of 0.03Hz
Thickness Range 0.0 - 999.9nm
Film Thickness Resolution 0.10 Å  
Film Growth Rate  Resolution 0.1Å/S
Measurement Speed 1 - 10 time / S
Quartz Crystal Oscillator 10 pcs new oscillators crystal ( 14mm diameter )  included
Crystal Probe Holder Probe length  : 120 mm standard ( 30 - 1000 mm customized length available upon request )
Probe diameter: 10 mmwith
Vacuum connecting:   CF25
Built in water cold jacket to keep probe temperature lower than 150oC
Control & Display Control box : connect to Oscillator box
6 digital LED display with  zero button
allow to set up thickness termination program to shutdown coater power
Oscillator box:  
connect to control box
oscillator box dimension: 96 x 45 x 18mm
also can directly connect to PC via USB connector to minitor thickness
PC operation software is included
 Warranty One year limited warranty with lifetime support
Compact High Resolution Thin Film Thickness Measurement SystemCompact High Resolution Thin Film Thickness Measurement System
Compact High Resolution Thin Film Thickness Measurement System
Compact High Resolution Thin Film Thickness Measurement System
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Our main products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,CVD system and customized lab equipment.Welcome you come to visit us. 

Compact High Resolution Thin Film Thickness Measurement System
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Compact High Resolution Thin Film Thickness Measurement System


 

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