After-sales Service: | Online Support |
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Warranty: | 1 Year |
Type: | Ceramic Heating Equipment |
Certification: | CE, ISO |
Structure: | Coating System |
Brand: | Cyky |
Customization: |
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magnetron sputtering with ion cleaning process DC/RF Dual-Head High Vacuum 2" Magnetron Plasma Sputtering Coater
Brief introduction of the magnetron sputtering system:
CY-MSP-RFDC is a compact magnetron sputtering system with dual 2" target sources, e.g., one DC source for coating metallic film, and another RF source for coating non-metallic material. A film thickness tracker is included to enable the user to control processing easily. This coater is designed for coating both single or multiple film layers for a wide range of materials, such as alloy, ferroelectric, semiconductor, ceramic, dielectric, optical, PTFE etc. at low cost.
Brief introduction of the magnetron sputtering system:
CY-MSP-RFDC is a compact magnetron sputtering system with dual 2" target sources, e.g., one DC source for coating metallic film, and another RF source for coating non-metallic material. A film thickness tracker is included to enable the user to control processing easily. This coater is designed for coating both single or multiple film layers for a wide range of materials, such as alloy, ferroelectric, semiconductor, ceramic, dielectric, optical, PTFE etc. at low cost.
Specification of the DC/RF Dual-Head High Vacuum 2" Magnetron Plasma Sputtering Coater system
Compact Structure | |
Input Power |
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Source Power | Two sputtering power sources are integrated into one control box
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Magnetron Sputtering Head |
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Vacuum Chamber |
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Sample Holder |
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Gas Flow Control |
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Vacuum Pump Station |
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Thickness Monitor |
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Overall Dimensions | L1300mm× W660mm× H1200mm |
Net Weight | 460 kg |
Warranty | One years limited warranty with lifetime support |
Application Note |
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Display of the DC/RF Dual-Head High Vacuum 2" Magnetron Plasma Sputtering Coater system
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