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Zhengzhou CY Scientific Instrument Co., Ltd.

Plasma Cleaning Machine, Wafer Plasma Cleaner, Vacuum Plasma Cleaner manufacturer / supplier in China, offering Economy Low Price Small Plasma Cleaning Machine with Vacuum Pump, High Temperature High Purity 99.97% Alumina Ceramic Tube, Ce Certified Graphene Growth CVD Furnace Machine and so on.

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Supplier Homepage Product Lab Heating Equipment tube furnace Economy Low Price Small Plasma Cleaning Machine with Vacuum Pump

Economy Low Price Small Plasma Cleaning Machine with Vacuum Pump

FOB Price: US $4,000 / Piece
Min. Order: 1 Piece
Min. Order FOB Price
1 Piece US $4,000/ Piece
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Port: Zhengzhou, China
Production Capacity: 210 Sets Per Month
Payment Terms: L/C, T/T, Western Union

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Basic Info
  • Model NO.: CY-EQ-PCE-6
  • Cleaning Media: Dry Cleaning
  • Cleaning Precision: General Industrial Cleaning
  • Principle: Physical Cleaning
  • Condition: New
  • Feature: Energy Saving
  • Control Panel: Touch Screen
  • Transport Package: Wooden Box
  • Origin: Zhengzhou, China
  • Application: Textile Industry
  • Automation: Automatic
  • Control: PLC
  • Certification: CE, TUV
  • Customized: Customized
  • Plasma Chamber: Quartz Chamber
  • Trademark: CY
  • Specification: Dia. 160x190mm
  • HS Code: 85141090
Product Description
Medium Plasma Cleaner with Vacuum Pump , 6"Dx 6.5" L ( 3 Liter) Quartz Chamber 13.56 Mhz, 30W max. - EQ-PCE-6
EQ-PCE-6 is medium plasma cleaner with 6" Dia x 6.5"Length quartz chamber.  It is designed to clean and remove nano-scale organic contamination on the substrate or wafer up to 4" using air, oxygen, or argon plasma. The rate of organic removal is about 20 nm/min Maximum at high RF power. It is an excellent tool to pre-clean single crystal substrate before epitaxial film deposition to achieve the better quality.
Input Power
AC 220V, 50/60 Hz
RF Power:    100 W Max.
Vacuum Pump:   < 500W
Total Power:    < 600W
RF PowerRF power (High voltage & high-frequency current applied on the coil) is adjustable at three levels: Low Setting 7.2W; Medium Setting 10.2W; High Setting 30W
RF frequency:   13,56 MHz
Control PanelControl Function: Clean time, RF Power, Vacuum Pump.
Plasma Chamber
6" diameter x 6.5" length quartz chamber
3 Liter Capacity
Hinged type door with viewing window for easy sample loading and observing
Vacuum Pump 
One Single Step Rotary Vane Vacuum Pump (220V,187 L/m ) with Exhaust filter and vacuum pipe are included for the equipment (220V).
Inert GasMany inert gases can be chosen for plasma cleaning such as N2, Ar, Air and Mixed gas depended on what kind material will be treated. ( not included in the package)
No flammable gas shall be used for the plasma cleaner
Combinations of PCE-6 plasma cleaner with Two Channel Gas Mixer will be a solution for introducing up to two process gases. Order plasma cleaner with the two-channel gas mixer from product options or Click the picture left for Two Channel Gas Mixer.
If use 4" wafer quartz boat, the cleaner can treat 25 pcs 2" Dia wafer per load 
Dimensions400mm L ×300mm W ×300mm H
16" x 12" x 12" (inch)
Net Weight 30 Lbs
Shipping Weight & Dimensions140 lbs
WarrantyOne year limited warranty with lifetime support ( no warranty for Pyrex glass chamber )
Application Note:Positive Pressure may damage Plasma Quartz Chamber. 
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