• Bubbler Flash Evaporator for Liquid Sources & Chemical Precursors Delivery in CVD Processes
  • Bubbler Flash Evaporator for Liquid Sources & Chemical Precursors Delivery in CVD Processes

Bubbler Flash Evaporator for Liquid Sources & Chemical Precursors Delivery in CVD Processes

Customized: Customized
Structure: Desktop
Material: Stainless Steel
Certification: CE, TUV
Type: Measurement Type
Pressure: 0.1-0.15MPa
Customization:

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Basic Info.

Model NO.
CY-BL-200-600
Fittings
Dia.6.35mm
Max. Temperature
250c
Transport Package
Wooden Box
Specification
600ML
Trademark
CY
Origin
Zhengzhou, China
HS Code
85141090
Production Capacity
310 Sets Per Year

Product Description

Bubbler / Evaporator for Liquid Sources & Chemical Precursors Delivery in CVD Processes
 
The gas-liquid mixing tank CY-200 is especially suitable for the liquid vapor to be brought into the reaction chamber in the CVD experiment. The mixing tank body adopts 316 stainless steel, the upper part of the tank body is equipped with an air inlet outlet and a mechanical pressure gauge, two stainless steel valves were installed in the inlet and outlet, two joints are used with Φ6.35 connector, which makes the tank can withstand pressure 0.15Mpa (the amount of liquid steam is increased under positive pressure environment), tank can bear temperature up to 250C.
 
 
ModelBL-200-600BL-200-1000
Tank material316 stainless steel316 stainless steel
Volume600ml 1000ml
Tank SizeΦ75 x 200mm Φ75 x 300mm
Overall dimension130 x 90 x 440mm (L x W x H)130 x 90 x 540mm (L x W x H)
Range of mechanical pressure gauge -0.1 ~ 0.15 Mpa-0.1 ~ 0.15 Mpa
Max. pressure0.15Mpa0.15Mpa
Fittings of inlet and outletΦ6.35 tube fittingsΦ6.35 tube fittings
Max. temperature250°C250°C
 
Application Notes
Vessel should be cleaned after each use to prevent contaminants and bacteria build up.
    Never heat the source liquid inside the vessel near its boiling point without opening valve
  You may order  precision MFC to deliver vapor     Compact Liquid Vaporization Systems for CVD
 
 

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