1200c Innovative Plasma-Enhanced Chemical Vapor Deposition Equipment

• Customized: Customized
• Structure: Desktop
• Material: Steel
• Certification: CE, ISO
• Type: Heating Type
• Product Name: Sliding Rtp Tube Furnace
• Model NO.: CY-OTF-1200X-S2-50SL
• Transport Package: Wooden Case
• Specification: sliding rtp tube furnace
• Trademark: CYKY
• Origin: China
• HS Code: 85141090
• Production Capacity: 100 Sets Per Year

Product Description

Product Description

 

1200C degC Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for PECVD
 

This product is a plasma-enhanced rotary chemical vapor deposition system (rotating PECVD). The furnace tube adopts a variable-diameter design. The middle tube diameter is relatively thick and there are mixing partitions, which can repeatedly mix powder or particles with the rotation of the furnace tube. The working tube can be rotated 360° uninterruptedly through the mechanical transmission control, so that the materials in the tube can be stirred and mixed to obtain a uniform heating effect; the equipment is also equipped with a plasma generator, which is connected to the furnace tube by inductive coupling, and the generated plasma can cover the furnace tube effectively, increase the activation energy of the reactants, reduce the reaction temperature, and improve the reaction efficiency. The equipment is equipped with a three-way mass flow meter and a gas mixing device, which can be used to pass a variety of gases into the pipe. At the same time, the equipment is equipped with a high-performance mechanical pump that can quickly evacuate the furnace pipe to vacuum; the cooperation of the pump and the gas circuit can achieve more CVD processes. The rotating device is very suitable for continuously coating and modifying powder materials by CVD method in an atmosphere protected environment. 

Technical parameters of Rotary PECVD tube furnace:

Dual temperature zone tube furnace	Product model	CY-O1200-60IIC-R
	Equipment power	3KW
	Furnace tube material	High purity quartz
	Furnace tube size	Φ60*420+Φ100*360+Φ60*420mm   (Quartz heteromorphic tube)
	Furnace chamber length	440mm
	Heating zone length	200mm+200mm
	Operating temperature	0~1150ºC
	Limit temperature	1200ºC
	Temperature control accuracy	±1ºC
	Thermocouple type	K-type thermocouple
	Temperature control mode	30-segment program temperature control, PID parameter self-tuning
	Display mode	HD full color LCD touch screen
	Sealing method	304 stainless steel vacuum flange
	Power supply	AC: 220V 50/60Hz
	Rotation speed	0~13rpm
	Tilt angle	0~35°
3-channel mass flow meter	Product model	CY-3Z
	Number of gas paths	3 channels
	Flowmeter type	Mass flowmeter
	Measuring range	A channel: 0~100sccm; B channel: 0~200 sccm; C channel: 0~500 sccm
	Measurement accuracy	±1.5%
	Working pressure difference	0.1~0.5MPa
	Pipeline interface	1/4 inch ferrule connector
	Power supply	AC220V 50/60Hz
Vacuum system	Vacuum pump	Dual stage rotary vane pump
	Pumping speed	1.1L/s
	Pumping port	KF16
	Pump ultimate vacuum	10E-1Pa
	Power supply	AC220V 50/60Hz
RF power supply	Signal frequency	13.56MHz±0.005%
	Power output range	0~500W
	Maximum reflected power	100W
	RF output interface	50Ω, N-Type, female
	Power stability	≤5W

 

reference picture of the sliding RTP tube furnace:

Company Profile

 

Company information:
Zhengzhou CY Scientific Instrument Co., Ltd.-founded in  2013 is a high and new technology enterprise registered in Zhengzhou,Henan province. We mainly supply the lab instruments for material research in labs like the cutting machine, milling machine, polishing machine, sintering furnace, mixing machine, glove box, film coating machine, etc.