Computerized Gas Mass Flow Controller with Precision Software Control

• Accuracy: ±0.6-1%
• Main Application: Corrosive Liquid/Gas
• Size: 1/4"
• Sensor: Tube/Flange
• Application: Film Coating
• Type: Electromagnetic Flow Meter
• Model NO.: CY-MFC
• Measuring Media: Gas
• Measuring Principle: Thermodynamic
• Measurement Object: Open Channel
• Certification: CE, TUV
• Full Flow Range: 10ml/Min-1000L/Min
• Body Material: Aluminum/Stainless Steel
• Valve Seal: Viton-a Seals
• Display: Digital LCD
• Output Signal: 0-5VDC
• Warranty: One Year
• Transport Package: Wooden Box
• Specification: customized
• Trademark: CY
• Origin: Zhengzhou, China
• HS Code: 85141090
• Production Capacity: 240 Sets Per Month

Product Description

Computerized Mass Flow Controller (Max. 1000 SCCM) with Precision Software Control- EQ-MFC
Introduction
MFC-A is an digital mass flow controller for CVD/PECVD/Graphene furnace to control the gas flowing rate for different
research purposes.
Digital Mass Flow Controller for Gas Control Systems
Cost effective, High accuracy and fast response, Multi-gas, Auto-zero, Compatible interfaces.
Used for accurately controlling and measuring gas flow rate of high pressure.
Ideal for CVD and other gas mixture applications.
International standard DB15 pin fitting; connects to Furnaces with Swagelok1/4 fitting.
Software and communication cable is included for convenient control via computer
Specification

Full scale range (N2)	( 0~100,200,500,1000)SCCM
Accuracy	±1.0% S.P. (≥35% F.S.)
	±0.35% F.S.(<35% F.S.)
Repeatability	±0.2% FS
Linearity	±0.5% FS
Response Time	≤1sec
Valve Rest Position	Normally Closed or Normally Open
Temperature Coefficient	Zero: ≤±0.05% F.S./ºC Span: ≤±0.1% F.S.ºC(≤30 SLM) Span: ≤±0.2% F.S.ºC(>30 SLM)
Zero Drift	<0.6%F.S. per year without autozero
Surface Finish(Ra)	25Ra
Operation Temperature	(5~45)ºC
Communication Interface for input Signal	Digital: RS485 Device Net^TM Analog:(0~5)VDC or (4~20)mA
Communication Interface for Output Signal	Digital: RS485 Device Net^TM Analog:(0~5)VDC or (4~20)mA
Power Supply	±11 ~ ±16 VDC or +11 ~ +28 VDC(400mA)
Electronic Connector	D sub 9 pins male, D sub 15 pins male, DeviceNet^TM male
Differential Pressure	(0.05~0.35) Mpa(≤10000SCCM) (0.1~0.35) Mpa(20000SCCM,30000SCCM) (0.2~0.45) Mpa(50000SCCM)
Max Pressure	3MPa
Leak integrity	1×10^-9 atm·cc / sec He(1×10^-10 Pa·m^3 / sec He)
Seals Materials	Viton; Neoprene
Surface Chemistry (EP only)	--
Fittings	Swagelok1/4"
Weight	1kg

Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Our main products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,CVD system and customized
lab equipment.Welcome you come to visit us.