| After-sales Service: | 1 Year |
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| Warranty: | 1 Year |
| Type: | Coating Production Line |
| Coating: | Vacuum Coating |
| Substrate: | Steel |
| Certification: | CE |
| Customization: |
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Audited Supplier Four-target magnetron sputtering coater is a cost-effective magnetron sputtering coater independently developed by our company, which has the characteristics of standardization, modularization and customization. The magnetron target has a choice of 1 "2", customers can choose according to the size of the plated substrate; The power supply is 500W DC power supply and 500W RF power supply, DC power supply can be used for the preparation of metal film, RF power supply can be used for the preparation of non-metal film, three targets can meet the needs of multi-layer or multiple coatings. If customers have other coating needs, you can customize other RF power supply and pulse power supply, each type of power supply has a variety of specifications from 300W to 1000W.
The coating instrument is equipped with two high-precision mass flowmeters. If customers have other needs, they can customize the gas path of up to four mass flowmeters to meet the needs of complex gas environment construction; The instrument is equipped with advanced turbomolecular pump group, the limit vacuum can reach 1.0E-5Pa, and other types of molecular pumps are available for purchase. The gas route of the molecular pump is controlled by multiple solenoid valves, which can realize that the chamber can be opened and the sample can be taken out without the pump, which greatly improves your work efficiency. This product can be selected as an industrial computer to control the system, in the computer program can achieve the control of the vacuum pump group, sputtering power supply control and other most functions, can further improve your experimental efficiency.
The four target magnetron sputtering coating instrument can be used to prepare single or multi- layer ferroelectric film, conductive film, alloy film, semiconductor film, ceramic film, dielectric film, optical film, oxide film, hard film, polytetrafluoroethylene film and so on. Compared with similar equipment, the three-target magnetron sputtering coateris not only widely used, but also has the advantages of small size and easy operation. It is an ideal equipment for preparing material films in the laboratory
Dual-target DC magnetron sputtering coater application:
This device can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, and the like. Compared with similar equipment, the dual-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory.
Dual-target DC magnetron sputtering coater technical parameters:
| Coating vacuum system |
Vacuum assembly |
60m3/h mechanical pump and KYKY1600L molecular pump to form the pumping system and equipped with high- precision composite vacuum gauge to measure and monitor the vacuum degree in realtime; |
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Pumping time |
After the system is exposed to the atmosphere for a short time and filled with dry nitrogen, then pumping begins. The vacuum degree is less than 5×10-4Pa within 30 minutes, and the vacuum degree is less than 5Pa after the system stops pumping and shuts down for 12 hours; | |||
| Ultimate vacuum |
≤6×10-5Pa | |||
| Valve assembly |
Pre-extraction valve DN40, electric main valve CF200, DN16 vent valve, DN40 solenoid valve and various vacuum lines, etc. (the above valves are pneumatic or electric) | |||
| Vacuum automatic constant pressure |
The equipment can quickly reach the high vacuum, and can be automatically adjusted in real time when the required vacuum degree is reached after the process air intake, so as to maintain a stable vacuum degree, reduce the process to a high degree, and ensure the repeatability of the prepared sample. | |||
| Magnetron sputtering generation and control reaction system |
Coating chamber limit vacuum |
≤6×10-5Pa; System vacuum leak detection rate: ≤8.0×10-7 Pa.l/S | ||
| Vacuum chamber size |
500 x 500 x 420mm, | |||
| Gas type | Argon, nitrogen, hydrogen, oxygen | |||
| Substrate size as well as functional components |
Substrate sizes of Φ4 inches (compatible with small sizes) can be placed; Substrate rotation range 5~60 RPM adjustable; Substrate heating temperature 600±1ºC, controlled by thermocouple closed-loop feedback (i.e. PID temperature control) | |||
| Cooling method |
Water cooling | |||
| Sputter deposition and control system | Control system |
PLC+ PC software coating machine control system | ||
| Constant pressure working intake | of air | Use a thin film vacuum gauge for measurement |
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| Measuring range |
3 Pa 0.013 Pa | |||
| Target number | size, | 4 2-inch sputter targets | ||
| Target Spacing |
The four targets are sputtered vertically upward, and the distance between the target and the sample is adjustable | |||
Power Supply |
2 sets of 500W RF sputtering power supply (automatic matching), 2 sets of 500W DC sputtering power supply, 1 set of 500W bias power supply (improve the density and uniformity of the film layer, and have sputtering cleaning function) | |||
| Process air Intake assembly |
2 way MFC mass flow meter controls gas flow (0- 100SCCM, 0-200 SCCM), accurate to 0.1 sccm adjustable | |||
Evenness |
The uniformity of the inner membrane thickness of the 4- inch diameter wafer sample is less than 3%, and the error between the center point and the edge thickness is less than 3% | |||
| Other | Supply voltage |
AC220V,50Hz | ||
| Overall dimensions |
600mm X 650mm X 1280mm | |||
| Machine weight |
350kg | |||
| Machine power |
4KW | |||
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service
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