Type: | CVD Tube Furnace |
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Certification: | CE, ISO |
Structure: | Horizontal Type |
Brand: | Cyky |
Item Name: | CVD Tube Furnace |
Transport Package: | Wooden Case |
Customization: |
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CY-1200X series tube furnace | Mode | CY-01200 |
Display mode | LCD | |
Limiting temperature | 1200ºC | |
Working temperature | ≤1100ºC | |
Heating rate | ≤20ºC(suggestion:10ºC/min) | |
Heating element | Resistance wire | |
Heating zone | Single | |
Heating zone length | 440mm | |
Furnace tube material | High purity quartz | |
furnace tube OD | 50mm | |
Quartz tube length | 1000mm | |
Water Cooled Sealing Flange | The sealing flange designed with SS water cool tubing & valve. Water cooling on the flange is mainly for cooling down the o-ring inside the flange to ensure the best-sealed chamber at high temperature. If you can not use a ceramic block in two ends of the tube, you have to use the SS water cool tubing to keep flanges cool. Ultimate vacuum pressure: 10^-2 torr (by mechanical pump) 10^-5 torr (by turbo molecular pump) |
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Control mode | PID programmable Temperature control | |
Temperature accuracy | ±1ºC | |
Thermal Couple | K Type | |
Working voltage | AC 110-480V 50Hz~60Hz | |
Rated power | 2.5KW | |
Gas supply system | Mass Flow Meters & Gas Mixing Station |
· two precision mass flow controller ( MFC) with digital display and adjusting knob are installed on the left bottom case to control gas flow rate: · 2 Gas channels
· Gas inlet and outlet: 1/4" Swagelok tube connector · One 80mL gas mixing tank is installed in bottom case · Each gas channel has a stainless steel needle valve for easy on/off · The flow rate is adjustable from the MFC panel |
water cooling system | Water chiller | The Forced air cold Water-cooled Chiller that provides a clean, environmentally friendly and reliable source of temperature-controlled fluid for closed loop systems up to 10L/min. It eliminates scale buildup, sewerage cost, and tap water cooling expenses. This 9 Liters chiller provides high cooling capacity via air cold radiator at low cost and has a convenient digital reading and setting display. |
Warranty | 12 month (exclusive wearing part) |
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