Mini Solar CVD Tube Furnace with Gas Mixer and Vacuum Gauge

• Application: School, Lab
• Customized: Customized
• Certification: CE, TUV
• Structure: Portable
• Material: Steel
• Type: Tubular Furnace
• Model NO.: OTF-1200X-S50-2F
• Heating Element: Resistance Wire
• Tube Material: Quartz Tube
• Warranty: One Year
• Transport Package: Wooden Box
• Specification: dia. 50mm
• Trademark: CY
• Origin: Zhengzhou
• HS Code: 851410900
• Production Capacity: 210 Sets Per Month

Product Description

Mini CVD Tube Furnace with 2 Channel Gas Mixer, Vacuum Pump, and Vacuum Gauge
OTF-1200X-S50-2F Mini CVD tube furnace is a CE Certified split tube furnace for heating samples up to 1200°C. A KF25 Gas Outlet and a Digital Vacuum Gauge are installed in the right flange for connection with a 226L/m Mechanical Pump (with Pump Filter). The left flange is used to connect a 2 channel gas mixing station through the 1/4" gas pipe. The precision temperature controller will provide 30 segments heating and cooling steps with +/- 1 °C accuracy. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases. In addition, you can get an accurate pressure reading with any mixed gases via the Digital Vacuum gauge.
 
Technical Parameters
  

Furnace	Structure	Heavy duty steel casing Energy efficient Al2O3 fibrous thermal  insulation
	Power Consumption	1.75KW
	Input Voltage	AC110V -240V
	Temperature	1200 Max. for < 1hr1100 for continuously heating
	Processing Tube	Quartz tube 50 x 43 x 450mm (O.D x I.D x Length)
	Heating Zone	Total heating zone length: 8" (200mm);  Constant temp. zone: 2.3" (60mm) (+/-1°C)
	Temperature Controller	PID automatic control and auto-tune function.  30 programmable segments for precise control of heating rate,  cooling rate and dwell time. Overheating & broken thermocouple protection. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 ºC temperature accuracy.
	Heating Elements	Fe-Cr-Al Alloy doped by Mo
Digital Vacuum Gauge	Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially  designed for vacuum measurements with presence of corrosive gases. Gauge is installed on the vacuum flange (left side) of tube furnace and provides  a wide measure range (10^-5 ~ 1000 torr). Accurate pressure reading with any mixed gases
Two Channel Gas  Mixing Station	Two floating flow meters 16 to 100 mL/min flow rate range Three mechanical pressure gauges (mixing tank): -0.1-0.15 MPa, (0.01 MPa/grit)  Vacuum needle valves are made of SS304  Three Pipe fittings for 1/4" pipe (nylon or stainless steel) on the back panel  Compact size: 340Lx300Dx 180H mm ( 13.4"x12"x7")  Net Weight: 14 lbs
Oxygen Monitoring  (Optional)	An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for  preventing or reducing oxidation. Please click the picture below to learn more:
Vacuum Flanges and Fittings	one Digital vacuum gauge w/ 0.00001 ~ 1000 torr measurement range one 1/4" swagelok tube connector two KF-25 quick clamps one 600mm length SS vacuum bellows
Vacuum Pump	Model: EQ-2TW-4C two step high speed vacuum pump Voltage: The voltage of pump will be the same as the tube furnace. Pumping rate: 8CFM, 226L/min Vacuum level in the furnace system can reach 5x10-2 torr Power: 3/4 HP (500W) Oil volume: 1000ml
Net Weight	100 lbs
Product Dimensions	Furnace: 340 x 300 x 400 mm Vacuum Pump: 440 x 160 x 300 mm Gas Station: 340 x 300 x 180 mm
Shipping Weight	200lbs
Shipping Dimensions	45x45x35"
Warranty	One year limited