Pecvd Plasma Enhanced Chemical Vapor Deposition for Amorphous Silicon and Microcrystalline Silicon Films

• After-sales Service: 1 Year
• Warranty: 1 Year
• Application: Industry, School, Lab
• Customized: Customized
• Certification: CE
• Structure: Desktop
• Model NO.: CY-PECVD-450
• Material: Stainless Steel
• Type: Tubular Furnace
• RF Power Supply Cooling Method: Air-Cooling
• Heating Zone: Single Heating Zone 200mm
• Temperature Accuracy: +-1c
• Furnace Tube Material: High Purity Quartz
• Furnace Tube Size: Dia. 50*1200mm
• Adjustable Speed: 0-20rpm
• Transport Package: Standard Export Wooden Packaging
• Trademark: CYKY
• Origin: Zhengzhou Henan China
• HS Code: 8401200000
• Production Capacity: 50sets Per Month

Product Description

PECVD Plasma Enhanced Chemical Vapor Deposition for Amorphous silicon and microcrystalline silicon films

Product Description

 chemical vapor deposition adopts plasma enhanced chemical vapor deposition technology, which can use high-energy plasma to promote the reaction process, effectively increase the reaction speed and reduce the reaction temperature.
It is suitable for depositing thin films of silicon nitride, amorphous silicon and microcrystalline silicon on different substrates such as optical glass, silicon, quartz and stainless steel. It has good film-forming quality, less pinholes and is not easy to crack. It is suitable for the preparation of amorphous silicon and microcrystalline silicon thin film solar cell devices. It can be widely used in the scientific research and small batch preparation of thin film materials in Colleges and universities and scientific research institutes.

Product Parameters

RF power supply	Signal frequency	13.56MHz
	Power output range	0~500W
	Maximum reflected power	100W
	Reflected power (at maximum power)	<5W
	Power stability	±0.1%
Working Chamber	Heating temperature	RT-1000ºC
	Temperature control accuracy	±1ºC
	Sample holder	Φ200mm
	Rotating speed of sample holder	1-20rpm adjustable
	Spray head size	Φ90mm
	Distance	The distance between the spray head and the sample is 40-100mm continuously adjustable
	Working vacuum for deposition	0. 133- 133Pa (can be adjusted according to the technical process)
	Flange	The top flange can be lifted by the motor, the substrate is easy to change, and there is a visual window
	Chamber	Stainless steel material, Φ500mm * 500mm
	Observation window	Φ100mm, with baffle
Gas supply system	Channel numbers	6
	Measuring unit	Mass flow controller
	Measuring range	A channel: 0~200SCCM for H2	Remarks: If other ranges are required, please specify when ordering. According to the customer's specific requirements, the flow meter of corresponding gas type and range is optional.
		B channel: 0~200SCCM for CH4
		C channel: 0~200SCCM for C2H4
		C channel: 0~500SCCM for N2
		D channel: 0~500SCCM for NH3
		E channel: 0~500SCCM for Ar
	Measurement accuracy	±1.5%F.S
	Working pressure difference	-0.15Mpa~0.15Mpa
	Connecting pipe	304 stainless steel
	Gas channel	304 stainless steel needle valve
	Interface specification	1/4" ferrule connector for gas inlet and outlet
Vacuum system	Backing pump	4.7L/s
	Molecular pump	1200L/s
	Vacuum measurement	Compound vacuum gauge, range 10^-5Pa ~ 10^5Pa
	Vacuum degree	5.0*10^-3Pa
Water chiller	Cooling water temperature	<=37ºC
	Water flow	10L/min
	Power	0.1KW
	Cooling power	50W/ºC
Power supply		AC220V 50Hz

 

Detailed Photos

 

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.





Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service