Three Evaporation Source High Vacuum Coater

• After-sales Service: Online Video
• Warranty: 1 Year
• Type: Coating Production Line
• Coating: Vacuum Coating
• Substrate: Steel
• Certification: CE
• Model NO.: CY-1800X-TE3-SS
• Condition: New
• Evaporation Source: Tungsten Boat X2
• Chamber Size: Dia. 300mm * 400mm
• Chamber Material: 304 Stainless Steel
• Backing Pump: Dual Stage Rotary Vane Pump
• Secondary Pump: Turbo Molecular Pump
• Ultimate Vacuum: 1.0e-5PA
• Supply Voltage: AC380V,50Hz
• Total Power: 5kw
• Transport Package: Wooden Box Outside, Plastic Paper Inside
• Specification: Customized
• Trademark: CYKY
• Origin: Zhengzhou, China
• HS Code: 8402111000
• Production Capacity: 100pieces/Month

Product Description

Three source high vacuum evaporation coating equipment for depositing metal films 

Introduction of Three source high vacuum evaporation coater:
This equipment is a high-vacuum coater with three evaporation sources. The equipment adopts a front door type vacuum chamber design, which has a large chamber space and strong expandability, which can meet the evaporation coating of multi-style and large-size samples. The chamber is equipped with an upper sample stage, and the clamping or clamping sample mounting parts can be selected according to the user's sample style. The sample stage is rotatable, heated, and all operations are integrated through the touchscreen. The vacuum pump group of the equipment is a two-stage vacuum system, which consists of a bipolar rotary vane vacuum pump and a turbo molecular pump, which can provide a clean and oil-free high vacuum environment for vacuum coating experiments; the vacuum system contains a complete pneumatic valve system, users can One-button operation through the touch screen realizes operations such as vacuum extraction, non-stop sampling, and complete shutdown.

Detail intruduction:

There are three groups of evaporation sources in this equipment, which are tungsten boat evaporation sources and water-cooled copper electrodes, which can support a maximum current of 260A, and the heating temperature can reach up to 1800ºC. It can realize the evaporation of various refractory metals. The three groups are independent Thermal evaporation source, will not cause mutual contamination of plating materials. The equipment adopts an integrated design, the cavity and the electric control part are separated left and right, which realizes the separation of water and electricity, and effectively ensures the safety of users. The electronic control part adopts the design of the combination of touch screen and button panel. Auxiliary functions such as vacuum system and sample stage are operated by one button on the touch screen, and power-on evaporation and film thickness control are operated independently through the panel, which is as convenient as possible for users at the same time. Avoid the possibility of misuse. The equipment has perfect design and excellent performance, and is a must-have for high-precision evaporation coating experiments in laboratories.

Application areas:

Metal and Dielectric Films
Manufacture of thin film sensors
Optical element
Nano and Microelectronics
Solar battery


Technical parameters of Three source high vacuum evaporation coater:

Three Evaporation Source High Vacuum Coater
Sample stage	Size	Maximum support φ150mm sample
	Function	Rotatable, heating up to 500°C
Evaporation source	Quantity	Tungsten boat x3
Power	Each evaporation source is equipped with an independent power supply; three evaporation sources have a total of three independent power supplies
Vacuum chamber	Cavity size	φ300x400mm
	Observation window	Front φ100mm
	Cavity material	304 stainless steel
	Open method	Front door
Film thickness control (optional)	Crystal-type film thickness measuring instrument, optional multi-channel film thickness controller
Vacuum system	Foreline pump	Bipolar Rotary Vane Pump
	Exhaust port	KF16
	Secondary pump	Turbomolecular pump
	Exhaust port	CF160
	Vacuum measurement	Resistance + Ionization Composite vacuum gauge
	Exhaust rate	Mechanical pump 1.1L/s Molecular pump 600L/s
	Ultimate vacuum	1.0E-5Pa
	Power supply	AC 220V 50/60Hz
	Pumping rate	Rotary vane pump: 1.1L/S
Control System	PLC automatic control Operation interface: touch screen + operation panel (touch screen controls deposition process and fast data entry; user friendly PLC software system, can be updated via network)
Other	Supply voltage	AC380V,50Hz
	Overall size	1000mm X 800mm X 1500mm
	Total power	5kW
	Total Weight	350kg

Detail pictures of Three source high vacuum evaporation coater:

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.



Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service