• PE-Hpcvd Rotary Furnace with in-Situ Evaporator, 4 Channel MFC and Vacuum Pump
  • PE-Hpcvd Rotary Furnace with in-Situ Evaporator, 4 Channel MFC and Vacuum Pump
  • PE-Hpcvd Rotary Furnace with in-Situ Evaporator, 4 Channel MFC and Vacuum Pump
  • PE-Hpcvd Rotary Furnace with in-Situ Evaporator, 4 Channel MFC and Vacuum Pump
  • PE-Hpcvd Rotary Furnace with in-Situ Evaporator, 4 Channel MFC and Vacuum Pump

PE-Hpcvd Rotary Furnace with in-Situ Evaporator, 4 Channel MFC and Vacuum Pump

Type: Ceramic Heating Equipment
Certification: CE, TUV
Structure: Horizontal Type
Brand: Cy
Sealing Flange: Stainless Steel
RF Frequency: 13.56MHz
Customization:

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Basic Info.

Model NO.
CY-OTF-1200X-II-PEC4
Cooling
Air Cooling
Matching
Automatic
Reflection Power
100W
Name
PE-Hpcvd Rotary Furnace
Transport Package
Wooden Box
Specification
dia. 100mm
Trademark
CY
Origin
Zhengzhou, China
HS Code
85141090
Production Capacity
310 Sets Every Year

Product Description

1200C PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump -  is a 1200ºC Rotatable Two-Zone Plasma-Enhanced Hybrid-Physical-Chemical Vapor Deposition (PE-HPCVD) system. It consists a Titable Frame, 300W RF Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with Power Supply, Four Channel MFC Gas Delivery and High Performance Vacuum Pump. Such a complete system is an excellent tool for heat treating inorganic compound powders with superior temperature and surface coating uniformity.
System Structure

 
0~25° adjustable tilt frame assists smooth powder loading/unloading
Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma enhanced processing which significantly reduces the needs for high-temperature process
Gear driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity 
Four channel gas mixing station with MFCs provide precise control of gas delivery
The integration of Up-Stream Source Evaporation Boat with tungsten coil allows you sublimate solid precursors for the needs of Hybrid Physical-Chemical processing

Two-Zone Rotary Furnace
 
Working temp: 1200ºC Max(<1hrs)., and 1100ºC for continuous heating 
Two PID temperature controllers with 30 segments programmable.
Input Power: 208 - 240VAC, single phase at max. 2.5KW.
High purity Alumina fibrous insulation for max. energy saving
Gear DC motor drives quartz tube with variable speed 2 - 10 RPM
Split cover enables faster cooling and easy operation
Two zones: each zone length 8" (200 mm), total 16" (400 mm) heating zone
Constant temperature zone: 200 mm within +/-1oC if two zones at the same temperature.

Plasma RF Power Supply
 
 
Output Power:           5 -300W adjustable with ± 1% stability.
RF frequency:           13.56 MHz ±0.005% stability.
Reflection Power:      100W max.
Matching:                  Automatic
RF Output Port:         50 Ω, N-type, female
Noise:                       <50 dB.
Cooling:                     Air cooling.
Power:                      208-240VAC, Single Phase, 50/60Hz
Evaporation Boat   Working temp: 1100ºC Max(<1hrs)., and 1000ºC for continuous heating 
0.7ml alumina crucible with tungsten heating coil surrounded.
S type thermocouple insert for accurate temperature measurement of the source material.
500W DC evaporation power supply with max. operating current @ 30Amps
Sealing Flanges
 
Standard:  4'' O.D Fused quartz processing tube
One pair of 60mm SS sealing flange with rotatable gas connector needle valves and are included for immediate use
Sealing Flanges
  
A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube
Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the foreline or downstream attachments (such as gas, powder and electrical delivery lines
Tube Rotation Speed 0 - 5 RPM variable
Furnace Tilt Angle 0~30°
Vacuum Pump & Gauge
 
EQ-FYP High-Performance Dual Stage Vacuum Pump is included in the sale
KF25 adapter and stainless steel bellows are connected between pump and tube flange
10E-2 Torr vacuum can be achieved inside the processing tube   
Note: Vacuum Gauge is available at additional cost

MFC Gas Mixing Station
Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control gas flow rate automatically. 
MFC 1: Gas flow range from 0~100 SCCM
MFC 2&3: Control range from 0~200 SCCM  
MFC 4: Control range from 0~500 SCCM
Gas inlet/outlet fittings: 6mm O.D tube fitting
Power: 208-240VAC 50/60Hz
Stainless steel needle valves for manual ON/OFF control of gas supply.
Large PLC touch screen control enable easy flow rate settings



Temperature Control
  
Two heating zone design with individual temperature controller
Precise PID control of heating, cooling rate and dwell time, 30 programmable segments for 
Built-in overheating & broken thermocouple protection.
Over temperature protection and alarm allows for operation without attendant(s).
+/- 1 ºC temperature accuracy.
Three K-type thermocouples (one for each zone).
RS485 Communications Port.
Warranty One year limited warranty with lifetime support

PE-Hpcvd Rotary Furnace with in-Situ Evaporator, 4 Channel MFC and Vacuum Pump
PE-Hpcvd Rotary Furnace with in-Situ Evaporator, 4 Channel MFC and Vacuum Pump
PE-Hpcvd Rotary Furnace with in-Situ Evaporator, 4 Channel MFC and Vacuum Pump
PE-Hpcvd Rotary Furnace with in-Situ Evaporator, 4 Channel MFC and Vacuum Pump
PE-Hpcvd Rotary Furnace with in-Situ Evaporator, 4 Channel MFC and Vacuum Pump


 

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